Oscillating device

ABSTRACT

An oscillating device including a vibrating table, an actuator configured to oscillate the vibrating table in a first direction, a coupling mechanism configured to couple the vibrating table with the actuator in such a manner that the vibrating table is movable relative to the actuator in a second direction orthogonal to the first direction, and a counter balancer attached to the vibrating table and configured to compensate an imbalance of an oscillated portion including at least the vibrating table, the imbalance being caused by attaching the coupling mechanism to the vibrating table.

CROSS-REFERENCE TO RELATED APPLICATION

This is a Continuation-in-Part of International Application No.PCT/JP2017/000978 filed on Jan. 13, 2017, which claims priority fromJapanese Patent Application No. 2016-006691 filed on Jan. 15, 2016.Japanese Patent Application No. 2016-006692 filed on Jan. 15, 2016,Japanese Patent Application No. 2016-131170 filed on Jun. 30, 2016, andJapanese Patent Application No. 2016-205586 filed on Oct. 19, 2016. Theentire disclosures of the prior applications are incorporated herein byreference.

TECHNICAL FIELD

The present disclosure relates to oscillating devices and electrodynamicactuators for vibration tests and the like.

BACKGROUND

A triaxial simultaneous oscillating device (triaxial simultaneousvibration test device) that oscillates a vibrating table, on which anoscillated object (e.g., a specimen for a vibration test) is fixed,simultaneously in three orthogonal axis directions (X-axis direction,Y-axis direction and Z-axis direction) is known. To oscillate thevibrating table simultaneously in three orthogonal axis directions, forexample, the vibrating table and a Z-axis actuator for oscillating thevibrating table in the Z-axis direction need to be coupled slidably inthe X-axis direction and the Y-axis direction with a biaxial slider (XYslider).

An oscillating device that enables triaxial simultaneous oscillation ata frequency range ranging up to several hundreds Hz by such as the useof a rolling guide type linear guideway (Hereinafter simply referred toas “linear guide.”) as the biaxial slider is conventionally known.

Also, an oscillating device that enables triaxial simultaneousoscillation at a frequency range exceeding 1 kHz by such as the use ofrollers as rolling bodies to improve a rigidity of the linear guide isconventionally known.

SUMMARY

In onboard devices or the like, the triaxial simultaneous vibration testat a high frequency range of equal to or more than 2 kHz is desired, butno oscillating device that enables the triaxial simultaneous vibrationtest at frequencies of equal to or more than 2 kHz had been realizeduntil now. As a result of the inventor's analysis, it has been provedthat a rigidity and a motion accuracy (rectilinearity) of the linearguide need to be further improved to further reduce vibration noises inorder to realize the triaxial simultaneous vibration test at frequenciesof equal to or more than 2 kHz.

Aspects of the present disclosure are advantageous to provide one ormore improved techniques, for an oscillating device and anelectrodynamic actuator, which make it possible to reduce vibrationnoises.

According to aspects of the present disclosure, there is provided anoscillating device including a vibrating table, an actuator configuredto oscillate the vibrating table in a first direction, a couplingmechanism configured to couple the vibrating table with the actuator insuch a manner that the vibrating table is movable relative to theactuator in a second direction orthogonal to the first direction, and acounter balancer attached to the vibrating table and configured tocompensate an imbalance of an oscillated portion including at least thevibrating table, the imbalance being caused by attaching the couplingmechanism to the vibrating table.

According to aspects of the present disclosure, further provided is anoscillating device including a vibrating table, an X-axis actuatorconfigured to oscillate the vibrating table in an X-axis direction, aY-axis actuator configured to oscillate the vibrating table in a Y-axisdirection, a Z-axis actuator configured to oscillate the vibrating tablein a Z-axis direction, the X-axis direction, the Y-axis direction andthe Z-axis direction being orthogonal to each other, a YZ couplingmechanism configured to couple the vibrating table with the X-axisactuator in such a manner that the vibrating table is movable relativeto the X-axis actuator in the Y-axis direction and the Z-axis direction,a ZX coupling mechanism configured to couple the vibrating table withthe Y-axis actuator in such a manner that the vibrating table is movablerelative to the Y-axis actuator in the Z-axis direction and the X-axisdirection, an XY coupling mechanism configured to couple the vibratingtable with the Z-axis actuator in such a manner that the vibrating tableis movable relative to the Z-axis actuator in the X-axis direction andthe Y-axis direction, a first counter balancer attached to the vibratingtable and configured to compensate a first imbalance of an oscillatedportion including at least the vibrating table, the first imbalancebeing caused by attaching the YZ coupling mechanism to the vibratingtable, a second counter balancer attached to the vibrating table andconfigured to compensate a second imbalance of the oscillated portion,the second imbalance being caused by attaching the ZX coupling mechanismto the vibrating table, and a third counter balancer attached to thevibrating table and configured to compensate a third imbalance of theoscillated portion, the third imbalance being caused by attaching the XYcoupling mechanism to the vibrating table.

According to aspects of the present disclosure, further provided is anoscillating device including a vibrating table, an actuator configuredto oscillate the vibrating table in a first direction, and a couplingmechanism configured to couple the vibrating table with the actuator insuch a manner that the vibrating table is movable relative to theactuator in a second direction orthogonal to the first direction. Thevibrating table includes a predetermined imbalance previously providedthereto, the predetermined imbalance being set to make a center ofgravity of an oscillated portion to be oscillated by the actuatorpositionally coincide with a center of an outer shape of the vibratingtable, the oscillated portion including the vibrating table and a partof the coupling mechanism.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a front view of an oscillating device according to the firstembodiment of the present disclosure.

FIG. 2 is a side view of the oscillating device according to the firstembodiment of the present disclosure.

FIG. 3 is a plan view of the oscillating device according to the firstembodiment of the present disclosure.

FIG. 4 is a block diagram of a drive control system of the oscillatingdevice according to embodiments of the present disclosure.

FIG. 5 is a front view of a Z-axis oscillating unit according to thefirst embodiment of the present disclosure.

FIG. 6 is a side view of the Z-axis oscillating unit according to thefirst embodiment of the present disclosure.

FIG. 7 is a plan view of the Z-axis oscillating unit according to thefirst embodiment of the present disclosure.

FIG. 8 is a longitudinal section view of a vertical drive electrodynamicactuator according to the first embodiment of the present disclosure.

FIG. 9 is an external view of a movable part of the vertical actuator.

FIG. 10 is an external view of an expansion frame.

FIG. 11 is an enlarged longitudinal section view around a neutral springmechanism of a horizontal drive electrodynamic actuator according to thefirst embodiment of the present disclosure.

FIG. 12 is a plan view of an XY slider according to the first embodimentof the present disclosure.

FIG. 13 is a side view of a cross guide according to embodiments of thepresent disclosure.

FIG. 14 is a plan view of an A-type linear guide according toembodiments of the present disclosure.

FIG. 15 is a side view of the A-type linear guide according toembodiments of the present disclosure.

FIG. 16 is a front view of the A-type linear guide according toembodiments of the present disclosure.

FIG. 17 is a cross sectional view of the A-type linear guide accordingto embodiments of the present disclosure.

FIG. 18 is a diagram showing a section I-I of FIG. 17.

FIG. 19 is an illustration diagram of a retainer.

FIG. 20 is a side view of an X-axis oscillating unit according to thefirst embodiment of the present disclosure.

FIG. 21 is a front view of the X-axis oscillating unit according to thefirst embodiment of the present disclosure.

FIG. 22 is an enlarged view of the YZ slider shown in FIG. 21.

FIG. 23 is a plan view around a vibrating table of the oscillatingdevice according to the first embodiment of the present disclosure.

FIG. 24 is an enlarged side view around a spring mechanism of ahorizontal drive electrodynamic actuator according to the firstembodiment of a supporting unit.

FIG. 25 is a sectional view of an X-axis counter balancer.

FIG. 26 is a sectional view of a Z-axis counter balancer.

FIG. 27 is an enlarged plan view showing bolt fixing positions of theZ-axis counter balancer.

FIG. 28A and FIG. 28B show relative acceleration spectra in the X-axisdirection measured at four corners of an upper surface of the vibratingtable.

FIG. 29A and FIG. 29B show relative acceleration spectra in the Y-axisdirection measured at four corners of an upper surface of the vibratingtable.

FIG. 30A and FIG. 30B show relative acceleration spectra in the Z-axisdirection measured at four corners of an upper surface of the vibratingtable.

FIG. 31 is a diagram showing acceleration monitoring points on theZ-axis counter balancer.

FIG. 32 is a sectional view of a variation of the X-axis counterbalancer.

FIG. 33A, FIG. 33B and FIG. 33C are external views of the X-axis counterbalancer.

FIG. 34 is a plan view of a variation of the XY slider.

FIG. 35A and FIG. 35B are diagrams illustrating behaviors of the crossguide.

FIG. 36 is a plan view of the vibrating table according to the firstembodiment of the present disclosure.

FIG. 37 is a front view of the vibrating table according to the firstembodiment of the present disclosure.

FIG. 38 is a left side view of the vibrating table according to thefirst embodiment of the present disclosure.

FIG. 39 is a left side view of the vibrating table according to thefirst embodiment of the present disclosure.

FIG. 40 is an enlarged perspective view around the vibrating table ofthe oscillating device according to the second embodiment of the presentdisclosure.

FIG. 41 is an enlarged perspective view around the vibrating table ofthe oscillating device according to the third embodiment of the presentdisclosure.

FIG. 42 is an enlarged front view around the vibrating table of theoscillating device according to the fourth embodiment of the presentdisclosure.

FIG. 43 is an enlarged side view around the vibrating table of theoscillating device according to the fourth embodiment of the presentdisclosure.

FIG. 44 is an enlarged plan view around the vibrating table of theoscillating device according to the fourth embodiment of the presentdisclosure.

FIG. 45 is a perspective view of the oscillating device according to thefifth embodiment of the present disclosure.

FIG. 46 is a diagram showing a distal end of a Y-axis oscillating unitto which a ZX slider according to the fifth embodiment is attached.

FIG. 47 is a side view around the XY slider according to the fifthembodiment.

FIG. 48 is a cross sectional view of the linear guide according to thefifth embodiment.

FIG. 49 is a diagram showing of a section I-I of FIG. 48.

FIG. 50 is a diagram illustrating arrangements of rails attached to atop plate of a movable part of the Z-axis oscillating unit according tothe fifth embodiment.

FIG. 51 is a front view of an electrodynamic triaxial oscillating deviceaccording to the sixth embodiment of the present disclosure.

FIG. 52 is a perspective view of a frame 6322 according to the sixthembodiment of the present disclosure.

FIG. 53 is a perspective view of the frame 6322 according to the sixthembodiment of the present disclosure.

FIG. 54 is a plan view of the vibrating table to which an initialimbalance is provided.

FIG. 55 is a front view of the vibrating table to which an initialimbalance is provided.

DETAILED DESCRIPTION OF EMBODIMENTS

Hereinafter, embodiments according to the present disclosure will bedescribed with reference to the accompanying drawings. In the followingdescription, the same or corresponding numerals are assigned to the sameor corresponding components, and redundant descriptions will be hereinomitted.

First Embodiment

FIG. 1 is a front view of a mechanism part 10 of an electrodynamictriaxial oscillating device 1 (Hereinafter abbreviated to “oscillatingdevice 1.”) according to the first embodiment of the present disclosure.In the following description, a left right direction in FIG. 1 isreferred to as X-axis direction (with the left direction as X-axispositive direction), an up-down direction in FIG. 1 is referred to asZ-axis direction (with the upward direction as Z-axis positivedirection), and a direction perpendicular to the paper in FIG. 1 isreferred to as Y-axis direction (with a direction going from thebackside to the front side of the paper as Y-axis positive direction).It is noted that, in the present embodiment, the Z-axis direction is avertical direction, and the X-axis direction and the Y-axis directionare horizontal directions. FIG. 2 and FIG. 3 are a left side view and aplan view of the mechanism part 10 of the oscillating device 1,respectively.

As shown in FIG. 1, the mechanism part 10 of the oscillating device 1includes a substantially box-like vibrating table 400 to which aspecimen (not shown) is to be fixed in a state where the specimen ishoused inside the vibrating table 400, three oscillating units (X-axisoscillating unit 100, Y-axis oscillating unit 200 and Z-axis oscillatingunit 300) which oscillate the vibrating table 400 in the X-axisdirection, the Y-axis direction and the Z-axis direction, respectively,and a device base 500 to which the oscillating units 100, 200 and 300are attached.

The oscillating units 100, 200 and 300 are linear motion oscillatingunits each including an electrodynamic actuator (voice coil motor).

The X-axis oscillating unit 100 is coupled to the vibrating table 400via a biaxial slider (YZ slider 160) being a slide coupling mechanism.The YZ slider 160 is configured to be able to accurately transmitvibration of the X-axis oscillating unit 100 to the vibrating table 400while permitting relative movement (sliding) between the X-axisoscillating unit 100 and the vibrating table 400 in two directions(Y-axis direction and Z-axis direction) orthogonal to an oscillatingdirection (X-axis direction) of the X-axis oscillating unit 100.Similarly, the Y-axis oscillating unit 200 and the Z-axis oscillatingunit 300 are coupled to the vibrating table 400 via a 7X slider 260 andan XY slider 360 being biaxial sliders, respectively. With thisconfiguration, the oscillating device 1 is capable of oscillating thevibrating table 400 and the specimen fixed to the vibrating table 400 inthe three orthogonal axis directions simultaneously and independentlyusing the oscillating units 100, 200 and 300.

FIG. 4 is a block diagram showing a brief configuration of a drivecontrol system 1 a of the oscillating device 1. The drive control system1 a includes a control part 20 configured to control operations of thewhole device, a measuring part 30 configured to measure vibration of thevibrating table 400, a power source 40 configured to supply electricalpower to each part of the oscillating device 1, and an interface part 50configured to perform input from and output to the outside.

The interface part 50 includes, for example, one or more of a userinterface for performing input from and output to a user, a networkinterface for connecting with every kind of networks such as a LAN(Local Area Network), and every kind of communication interfaces such asa USB (Universal Serial Bus) or a GPIB (General Purpose Interface Bus)for connecting with outside devices. Also, the user interface includes,for example, one or more of every kind of manipulation switches,indicators, every kind of display devices such as an LCD (Liquid CrystalDisplay), every kinds of pointing devices such as a mouse or atouch-pad, and every kind of input and output devices such as touchscreens, video cameras, printers, scanners, buzzers, speakers,microphones and memory card readers and writers.

The measuring part 30 includes a triaxial vibration sensor (triaxialvibration pickup) 32 attached to the vibrating table 400, and performsamplification and digital conversion to signals outputted by thetriaxial vibration sensor 32 (e.g., acceleration signals or velocitysignals) and sends them to the control part 20. It is noted that thetriaxial vibration sensor 32 detects vibrations in the X-axis direction,the Y-axis direction and the Z axis direction independently. Also, themeasuring part 30 calculates every kind of parameters indicating avibrating state of the vibrating table 400 (e.g., including one or moreof velocity, acceleration, jerk, acceleration level (vibration level),amplitude, power spectral density and the like) on the basis of thesignals from the triaxial vibration sensor 32 and sends them to thecontrol part 20. The control part 20 can oscillate the vibrating table400 in desired amplitudes and frequencies by controlling magnitudes andfrequencies of alternating currents to be inputted to a drive coil ofeach of the oscillating units 100, 200 and 300 (which will be describedlater) on the basis of oscillation waveforms input via the interfacepart 50 and/or data input from the measuring part 30.

Next, structures of each of the oscillating units 100, 200 and 300 willbe described. As will be described later, the X-axis oscillating unit100 and the Y-axis oscillating unit 200 includes horizontal driveelectrodynamic actuators (Hereinafter simply referred to as “horizontalactuator.”) 100A and 200A, respectively. Also, the Z-axis oscillatingunit 300 includes a vertical drive electrodynamic actuator (Hereinaftersimply referred to as “vertical actuator.”) 300A.

FIGS. 5, 6 and 7 are a front view, left side view and plan view of theZ-axis oscillating unit 300 (and the vibrating table 400), respectively.

The vertical actuator 300A includes an air spring 330 (FIG. 8) forsupporting weights (static loads) of the specimen and the vibrationtable. On the other hand, the horizontal actuators 100A and 200A includeneutral spring mechanisms 130 (FIG. 11) and 230 (not shown),respectively, that apply restoring forces for bringing the vibratingtable back to a neutral position (origin, reference position). Since theconfigurations of the horizontal actuators 100A and 200A are identicalto the vertical actuator 300A apart from the neutral spring mechanisms130 and 230 being provided instead of the air spring 330 and specificstructures of a supporting unit 350 and supporting units 150, 250, whichwill be described later, differing from each other, the detailedconfiguration of the vertical actuator 300A will be described on behalfof each of the actuators.

As shown in FIG. 8, the vertical actuator 300A includes a fixing part310 having a tubular body 312 and a movable part 320 of which a lowerportion thereof is accommodated inside the tube of the fixing part 310.The movable part 320 can move in the vertical direction (Z-axisdirection) with respect to the fixing part 310.

FIG. 9 is an external view showing a brief configuration of the movablepart 320. The movable part 320 includes a main frame 322 having asubstantially cylindrical shape, a drive coil 321 coaxially attached toa lower end portion of the main frame 322, and a rod 326 (FIG. 8)extending downward from the center of a lower surface of the main frame.Also, an expansion frame 324 having a diameter substantially equal to adiameter of the main frame 322 is coaxially attached to an upper endportion of the main frame 322.

The main frame 322 includes a substantially disk-shaped top plate 322 aarranged perpendicularly to the drive direction (Z-axis direction), atubular main column 322 c extending perpendicularly (in the drivedirection) from the center of a lower surface of the top plate 322 a,and eight ribs 322 b, each having a substantially rectangular flat plateshape, radially attached to an outer periphery of the main column 322 c.By the main column 322 c and the eight ribs 322 b, a substantiallytubular torso portion of the main frame 322 is formed. The eight ribs322 b are arranged around the main column 322 c at regular intervals ina circumferential direction. By coupling the top plate 322 a and themain column 322 c with the eight ribs 322 b arranged as described above,sufficient rigidity is given to the main frame 322. The top plate 322 a,the ribs 322 b and the main column 322 c are integrally coupled to eachother by welding or the like.

An outer periphery side of a lower end portion of each of the ribs 322 bprotrudes downwardly and forms a coil attaching part 322 d. The coilattaching parts 322 d of the eight ribs 322 b are inserted into an upperend portion of the drive coil 321, and the drive coil 321 is attached tothe main frame 322.

As shown in FIG. 8, to the main column 322 c, the rod 326 is fitted frombelow. A lower portion of the rod 326 protrudes downwardly from the maincolumn 322 c. Also, to the top plate 322 b, the expansion frame 324 isattached.

FIG. 10 is an external view of the expansion frame 324. As shown in FIG.10, the expansion frame 324 includes a torso portion 324 a having adiameter substantially equal to the diameter of the main frame 322, anda top plate 324 b attached horizontally on an upper end of the torsoportion 324 a. The top plate 324 b is a member having a substantiallyrectangular flat plate shape with a width (dimension in the X-axisdirection) and a depth (dimension in the Y-axis direction) equal to orlarger than the outer diameter of the torso portion 324 a.

On an upper surface of the top plate 324 b of the expansion frame 324,six streaks of grooves (pairs of perpendicular level differences 324 b1) extending in a lattice in the X-axis direction and the Y-axisdirection are formed. Along the level differences 324 b 1 on one side ofrespective grooves, rails 364 a of as many as one half the number of theXY sliders 360 (in the present embodiment, nine rails), which will bedescribed later, are arranged. That is, the level differences 324 b 1are positioning structures for attaching the rails 364 a at accuratepositions on the top plate 324 b. By providing the level differences 324b 1, it becomes possible to place the nine rails 364 a on the top plate324 b with high parallelism/perpendicularity only by simply attachingthe rails 364 a along the level differences 324 b 1. It is noted that aplurality of screw holes 324 b 2 for fixing the rails 364 a with boltsare formed on the bottom of each groove.

On each of both side surfaces of the torso portion 324 a in the X-axisdirection and the Y-axis direction, a level difference 324 a 1 and aplurality of screw holes 324 a 2 for positioning and fixing a Z-axisrail 344 a of a movable part support mechanism 340, which will bedescribed later, are formed. Also, on a lower surface of the torsoportion 324 a, a recess 324 a 3 is formed. The expansion frame 324 isfixed to the main frame 322 with bolts in a state where the top plate322 a of the main frame 322 is fitted in this recess 324 a 3.

Inside the tubular body 312 of the fixing part 310, a substantiallytubular shaped inner magnetic pole 316 arranged coaxially with thetubular body 312 is fixed. The tubular body 312 and the inner magneticpole 316 are both formed of magnetic substances. An outer diameter ofthe inner magnetic pole 316 is smaller than an inner diameter of thedrive coil 321, and the drive coil 321 is arranged in a gap between anouter peripheral surface of the inner magnetic pole 316 and an innerperipheral surface of the tubular body 312. Also, inside the tube of theinner magnetic pole 316, a bearing 318 configured to support the rod 326movably only in the Z-axis direction is fixed.

A plurality of recesses 312 b are formed on the inner peripheral surface312 a of the tubular body 312, and an excitation coil 314 isaccommodated in each of the recesses 312 b. When direct current(exciting current) is supplied to the exciting coils 314, magneticfields in radial directions of the tubular body 312 such as shown inarrows A are generated at positions where the inner peripheral surface312 a of the tubular body 312 and the outer peripheral surface of theinner magnetic pole 316 are closely opposing to each other. If a drivecurrent is supplied to the drive coil 321 in this state, Lorentz forceacting in the axial direction of the drive coil 321, that is, in theZ-axis direction, is generated and the movable part 320 is driven in theZ-axis direction.

Also, the air spring 330 is accommodated in the tube of the innermagnetic pole 316. A lower end of the air spring 330 is fixed to thetubular body 312. Also, a flange portion formed on the rod 326 is placedon and upper surface of the air spring 330. That is, the air spring 330supports the main frame 322 from below via the rod 326. Morespecifically, weights (static loads) of the movable part 320 and the XYslider 360, the vibrating table 400, an X-axis counter balancer 610, aY-axis counter balance part 620 and a Z-axis counter balancer 630 whichwill be described later, and the specimen supported by the movable part320 are supported by the air spring 330. Therefore, the need to supportthe weights (static loads) of the movable parts 320, the vibrating table400 and the like by the drive force (Lorentz force) of the Z-axisoscillating unit 300 is eliminated by providing the air spring 330 tothe Z-axis oscillating unit 300 and only dynamic load for oscillatingthe movable part 320 and the like needs to be supplied, and thus drivecurrent to be supplied to the Z-axis oscillating unit 300 (i.e., powerconsumption) is reduced. Also, since the drive coil 321 can be downsizeddue to the reduction of the necessary drive force, the weight of themovable part 320 can be reduced and thus the Z-axis oscillating unit 300can be driven in a higher frequency. Furthermore, since the need tosupply a large direct current component for supporting the weights ofthe movable part 320, the vibrating table 400 and the like to the drivecoil 321 is eliminated, a power source having a smaller and simplerconfiguration can be adopted as the power source 40.

Also, when the movable part 320 of the Z-axis oscillating unit 300 isdriven, the fixing part 310 also receives a strong reaction force(oscillating force) in the drive axis (Z-axis) direction. Theoscillating force transmitted from the movable part 320 to the fixingpart 310 is alleviated by providing the air spring 330 between themovable part 320 and the fixing part 310. Therefore, for instance,vibration of the movable part 320 is prevented from being transmitted tothe vibrating table 400 via the fixing part 310, the device base 500 andthe oscillating units 100 and 200 as noise components.

Now, a configuration of the horizontal actuator 100A will be described.As described above, the horizontal actuator 100A differs from thevertical actuator 300A in that the horizontal actuator 100A includes theneutral spring mechanism 130 (FIG. 11) instead of the air spring 330(FIG. 8) and in the specific structures of the supporting unit 150, butother basic configurations are in common. It is noted that, similarly tothe air spring 330, the neutral spring mechanism 130 is a cushioningdevice that elastically couples a fixing part 110 and a movable part 120of the horizontal actuator 100A. Also, the horizontal actuator 200A hasthe same configuration as the horizontal actuator 100A described below.

FIG. 11 is an enlarged longitudinal section view around the neutralspring mechanism 130 of the horizontal actuator 100A. Inside a brokenline frame is a back view of the neutral spring mechanism 130 viewedtoward the X-axis positive direction.

The neutral spring mechanism 130 includes an U-shaped stay 131, a rod132, a nut 133 and a pair of compression coil springs 134 and 135(elastic component). The U-shaped stay 131 is fixed to the bottomportion of the fixing part 110 (right end portion in FIG. 11) at flangeportions 131 a formed at both ends of the U-shape. Also, at the centerof a bottom portion 131 b of the U-shaped stay 131 (left end portion inFIG. 11), a through hole 131 b 1 through which the rod 132 extending inthe X-axis direction is inserted is provided.

A flange portion 132 b is provided at an end (left end in FIG. 11) ofthe rod 132, and the rod 132 is coupled to a tip (right end in FIG. 11)of a rod 122 a of the movable part 120 via the flange portion 132 b.Also, a male screw portion 132 a that engages with the nut 133 is formedon the other end portion (right end portion in FIG. 11) of the rod 132.

The pair of the coil springs 134 and 135 are put on the rod 132. Onecoil spring 134 is retained by being nipped between a flange portion ofthe nut 133 and the bottom portion 131 b (elastic component supportingplate) of the U-shaped stay 131. The other coil spring 135 is retainedby being nipped between the bottom portion 131 b of the U-shaped stay131 and the flange portion 132 b of the rod 132. A preload is applied tothe pair of the coil springs 134 and 135 by the tightening of the nut133. A position where restoring forces of the pair of the coil springs134 and 135 balance is a neutral position (or origin or referenceposition) of the movable part 120 of the horizontal actuator 100A in themovable direction (X-axis direction). When the movable part 120 movesaway from the neutral position, a restoring force that moves the movablepart 120 back to the neutral position acts on the movable part 120 bythe neutral spring mechanism 130 (directly by the pair of the coilsprings 134 and 135). Accordingly, it becomes possible to reciprocallydrive the movable part 120 in the X-axis direction with the neutralposition always as the reference position of the reciprocation, and thusa problem that a position of the movable part 120 sways while driving isovercome.

Next, returning back to the description of the vertical actuator 300A, aconfiguration of a movable part support mechanism 340 supporting anupper portion of the movable part 320 from a side thereof slidably inthe axial direction will be described.

As shown in FIG. 6 and FIG. 8, the movable part 320 of the verticalactuator 300A is supported from the sides thereof movably only in thedrive direction (Z-axis direction) by four movable part supportmechanisms 340 arranged at regular intervals around the movable part320.

The movable part support mechanism 340 of the present embodimentincludes an angle plate 342 and a Z-axis linear guide 344. Also, theZ-axis linear guide 344 includes the Z-axis rail 344 a and a Z-axiscarriage 344 b. It is noted that, in the present embodiment, as theZ-axis linear guide 344, a linear guide having a configuration identicalto an A-type linear guide 364A (FIGS. 14-19) which will be describedlater is used. It is noted that a linear guide is a mechanism thatguides a linear motion, and the Z-axis linear guide 344 guides a linearmotion in the Z-axis direction.

On a side face of the torso portion 324 a of the expansion frame 324 ofthe movable part 320, four Z-axis rails 344 a of the movable partsupport mechanisms 340 extending in the Z-axis direction are attached atregular intervals in a circumferential direction. It is noted that, inthe present embodiment, as shown in FIG. 3 and FIG. 7, two pairs of themovable part support mechanisms 340 are arranged to respectively opposeto each other in horizontal directions forming an angle of 45 degreeswith respect to the X-axis direction and the Y-axis direction, but forconvenience of explanation, in other drawings, the two pairs of themovable part support mechanisms 340 are shown to oppose in the X-axisdirection and the Y-axis direction, respectively. Also, the number andarrangement of the movable part support mechanisms 340 are not limitedto those of the configuration of the present embodiment, but, forexample, configurations in which the movable part 320 is supported bythree or more sets of the movable part support mechanisms 340 arrangedsubstantially at regular intervals around the movable part 320 arepreferable.

On a top face of the fixing part 310 (tubular body 312), four angleplates 342 are fixed at regular intervals (90 degree intervals) alongthe inner peripheral surface of the tubular member 312. The angle plate342 is a fixing member having an U-shaped (or L-shaped) cross-sectionand reinforced with a rib. To a vertical portion 342 u of each of theangle plates 342, the Z-axis carriage 344 b that engages with the Z-axisrail 344 a is fixed.

The Z-axis carriage 344 b has a plurality of balls RE (which will bedescribed later) as rolling bodies and configures the Z-axis linearguide 344, being a rolling guide, together with the Z-axis rail 344 a.That is, the movable part 320 is supported slidably only in the Z-axisdirection, at the upper portion of the expansion frame 324, from itssides by four sets of supporting structures (movable part supportmechanisms 340) each constituted of the angle plate 342 and the Z-axislinear guide 344 and is configured not to move in the X-axis directionand the Y-axis direction. Therefore, cross talks that occur due tovibrations of the movable part 320 in the X-axis direction and theY-axis direction are prevented. Also, the movable part 320 can movesmoothly in the Z-axis direction by the use of the Z-axis linear guide344 (rolling guide). Furthermore, since, as described above, the movablepart 320 is also supported, at its lower portion, by the bearing 318movably only in the Z-axis direction, rotations about the X axis, the Yaxis and the Z axis are also restricted, and thus unnecessary vibrations(vibrations other than the controlled translation in the Z-axisdirection) hardly occur.

Also, in general use modes of the linear guides, the rail is attached tothe fixed side, and the carriage is attached to the movable side.However, in the present embodiment, contrary to the general use modes,the Z-axis rail 344 a is attached to the movable part 320 and the Z-axiscarriage 344 b is attached to the angle plate 342. Unnecessaryvibrations are suppressed by adopting such an anomalous attachmentstructure. This is because, since the Z-axis rail 344 a is lighter thanthe Z-axis carriage 344 b, longer in length in the driving direction(Z-axis direction) (and therefore smaller in mass per unit length), andmass distribution is uniform in the driving direction, mass distributionchange when the Z-axis oscillating unit 300 is driven is smaller if theZ-axis rail 344 a is fixed to the movable part 320, and vibrations thatoccur due to the mass distribution change can be suppressed. Also, sincethe center of gravity of the Z-axis rail 344 a is lower than that of theZ-axis carriage 344 b (i.e., a distance between an installation surfaceand the center of gravity is shorter), an inertia moment becomes smallerif the Z-axis rail 344 a is fixed to the movable side. Therefore, due tothis configuration, it becomes possible to make a resonance frequency ofthe fixing part 310 sufficiently higher than oscillating frequency bands(e.g., equal to or more than 0-2000 Hz), and thus a decrease in anoscillating accuracy due to resonance is suppressed.

Next, a configuration of the XY slider 360 that couples the Z-axisoscillating unit 300 and the vibrating table 400 will be described.

FIG. 12 is a plan view illustrating the configuration of the XY slider360. As shown in FIG. 5, FIG. 6 and FIG. 12, the XY slider 360 accordingto the present embodiment consists of nine cross guides 364 (364L1-L3,364M1-M3, 364R1-R3) arranged at regular intervals in the X-axisdirection and the Y-axis direction. Each of these nine cross guides 364couples the Z-axis oscillating unit 300 (specifically, the movable part320 of the vertical actuator 300A) and the vibrating table 400 slidablyin the X-axis direction and the Y-axis direction with low resistance.

FIG. 13 is a side view of the cross guide 364. The cross guide 364 is across guide in which top faces of carriages of an A-type linear guide364A and a B-type linear guide 364B are superimposed and fixed togethersuch that their movable directions bisect at right angles. As will bedescribed later, since the carriages of the A-type linear guide 364A andthe B-type linear guide 364B are formed to be slightly longer in theirmoving directions, a mass distribution in a length (L) direction and amass distribution in a width (W) direction differ from each other, andthis may become a factor that causes a directionality in oscillatingperformance of the oscillating device 1. In the present embodiment, thecarriages of the A-type linear guide 364A and the B-type linear guide364B are directly fixed together while orienting the length direction ofone of the two in the width direction of the other to form a crosscarriage (a carriage of the cross guide 364). Due to this configuration,the mass distribution directionalities of the A-type linear guide 364Aand the B-type linear guide 364B are offset to respectable degrees andthereby a cross carriage with small mass distribution directionality canbe obtained. The directionality in the oscillating performance of theoscillating device 1 is alleviated by using such cross carriages.Details of the A-type linear guide 364A and the B-type linear guide 364Bwill be described later.

In FIG. 12, among a pair of linear guides (an X-axis linear guide 364Xslidable in the X-axis direction and a Y-axis linear guide 364Y slidablein the Y-axis direction) configuring each cross guide 364, the onearranged on the vibrating table 400 side is indicated with solid lines,and the one arranged on the Z-axis oscillating unit 300 side isindicated with broken lines. Focusing on the linear guides on thevibrating table 400 side indicated with solid lines, first orientationcross guides 364P (cross guides 364M1, 364L2, 364R2, 364M3) of which theX-axis linear guides 364X are attached to the vibrating table 400 andsecond orientation cross guides 364 (cross guides 364L1, 364R1, 364M2,364L3, 364R3) of which the Y-axis linear guides 364Y are attached to thevibrating table 400 are mixed. Furthermore, in each of the X-axisdirection and the Y-axis direction, orientations of adjacent crossguides 364 are made to alternate. That is, the first orientation crossguides 364P and the second orientation cross guides 364 are alternatelyarranged in each of the X-axis direction and the Y-axis direction. Byarranging the cross guides 364 while alternating their orientation asdescribed above, the mass distribution directionalities of the crossguides 364 are averaged and thereby the oscillating performance withsmaller directionality is realized.

Next, details of the A-type linear guide 364A and the B-type linearguide 364B configuring the cross guide 364 will be described.

FIG. 14, FIG. 15 and FIG. 16 are a plan view, a side view and a frontview of the A-type linear guide 364A (B-type linear guide 364B),respectively. The A-type linear guide 364A (B-type linear guide 364B)includes a rail 364 a and an A-type carriage 364 b/A (B-type carriage364 b/B).

The A-type carriage 364 b/A (B-type carriage 364 b/B) is provided withfour attachment holes HA (attachment holes HB), being tapped holes(drilled holes) for fixing bolts, at four corners of a top face of thecarriage. Structures of the A-type carriage 364 b/A and the B-typecarriage 364 b/B are identical except for types of the attachment holesHA, HB.

The four attachment holes HA, HB are formed such that their center linestouch respective corners of a square Sq (shown in a chain line in FIG.14) on the top face of the carriage. That is, intervals (lengths ofsides of the square Sq) at which the attachment holes HA of the A-typecarriage 364 b/A are formed coincide with intervals at which theattachment holes HB of the B-type carriage 364 b/B are formed, and thearrangements of the attachment holes HA, HB each have four timesrotation symmetry.

Therefore, the A-type linear guide 364 b/A and the B-type linear guide364 b/B are configured such that, even if the A-type linear guide 364b/A and the B-type linear guide 364 b/B are superimposed while shiftingtheir moving directions to each other by 90 degrees, the four attachmentholes HA and the four attachment holes HB respectively communicate,thereby making it possible to couple the A-type carriage 364 b/A and theB-type carriage 364 b/B by 4 bolts.

Also, since the attachment holes HA of the A-type carriage 364 b/A areformed as tapped holes and the attachment holes HB of the B-typecarriage 364 b/B are formed as drilled holes, the A-type carriage 364b/A and the B-type carriage 364 b/B can be coupled directly with eachother without using a coupling plate. This makes it possible to downsizeand reduce weight of the cross guide 364. By downsizing and reducingweight of the cross guide 364 by eliminating a coupling plate asdescribed above, a rigidity of the cross guide 364 increases (i.e.,eigen frequency of the cross guide 364 increases) and thereby theoscillating performance of the oscillating device 1 improves.Specifically, it becomes possible to oscillate up to a higher frequencywith less vibration noises. Also, due to the reduced weight, electricalpower needed to oscillate the cross guide 364 (i.e., to drive themechanism part 10) is reduced.

An L-shaped notch C1 is formed at each of the four corners of the topface of the carriage of the A-type carriage 364 b/A (B-type carriage 364b/B). Furthermore, a pair of L-shaped notches C2 extending in the movingdirection are formed at lower portions of both sides in a widthdirection (up-down direction in FIG. 14) of the A-type carriage 364 b/A(B-type carriage 364 b/B). That is, apart from flange portions Foverhanging from both sides in the width direction where the attachmentholes HA (attachment holes HB) are formed, both side edges of the A-typecarriage 364 b/A (B-type carriage 364 b/B) in the width direction arecut off. By these configurations, weight reduction of the A-typecarriage 364 b/A (B-type carriage 364 b/B) is realized.

Since, as described above, the cross guide 364 consists only of theA-type linear guide 364A and B-type linear guide 364B for cross guidesand four bolts for coupling the A-type linear guide 364A and B-typelinear guide 364B, the cross guide 364 is small, lightweight and have ahigh rigidity. Therefore, a resonance frequency of the cross guide 364is high, making it possible to realize an XY slider (slide couplingmechanism) with less vibration noises.

Also, as described above, apart from the attachment holes HA, HB, theA-type carriage 364 b/A and the B-type carriage 364 b/B have the samestructure. Therefore, by coupling the A-type linear guide 364A and theB-type linear guide 364B while shifting their moving directions to eachother by 90 degrees, the mass distribution directionalities of each ofthe linear guides in the length (L) direction and in the width (W)direction are offset, and thereby a cross guide 364 with small massdistribution directionality is realized.

Also, each of the carriage 364 b/A and 364 b/B has substantially twotimes rotation symmetry around an axis in an up-down direction(direction perpendicular to the paper in FIG. 14) but does not have fourtimes rotation symmetry. Therefore, response characteristics of each ofthe carriages 364 b/A, 364 b/B to external forces in the moveabledirection (left-right direction in FIG. 14) and in a lateral direction(up-down direction in FIG. 14) are different.

The carriage (cross carriage) of the cross guide 364 in which the A-typelinear guide 364 b/A and the B-type linear guide 364 b/B, each havingsubstantially two times rotation symmetry and their mass distributionsbeing substantially equal, are rotated by 90 degrees about an up-downdirection axis (rotation symmetry axis) and coupled with each otherobtains substantially four times rotation symmetry and thus has responsecharacteristics to external forces in two moving directions (X-axisdirection and Y-axis direction) being more homogenous.

By coupling the movable part 320 of the Z-axis oscillating unit 300 andthe vibrating table 400 via the cross guide 364, the vibrating table 400is coupled to the movable part 320 of the Z-axis oscillating unit 300slidably in the X-axis direction and the Y-axis direction.

Next, an internal structure of each linear guide configuring the crossguide 364 will be described by exemplifying the A-type linear guide364A.

FIG. 17 is a cross sectional view of the A-type linear guide 364A. Also,FIG. 18 is a diagram showing of a section I-I of FIG. 17. The A-typelinear guide 364A of the present embodiment is a linear guide of whichthe number of balls RE (the number of effective balls) being rollingbodies interposed between the rail and the carriage is increased toequal to or more than twice the ordinary number of balls by decreasingan outer diameter of the ball RE to about a half the ordinary outerdiameter and by setting the number of load paths for the rolling bodiesto eight streaks which is twice the ordinary number of load paths. Dueto this configuration, since the load is distributed to equal to or morethan twice the ordinary number of balls RE, a load for one ball RE isreduced by half, and thereby the rigidity of the linear guide improvessignificantly. Also, due to the increase in the number of effectiveballs, a more homogenous roll guiding becomes possible, and, as aresult, a motion accuracy of the carriage improves (specifically,posture fluctuations and vibrations of the carriage that occur duringtravelling decreases).

The A-type carriage 364 b/A includes a main block 364 b 1/A, a pair ofend blocks 36462 attached on both sides of the main block 364 b 1/A inthe moving direction, and four rod members R1, R2, R3, R4 respectivelyinserted in four cylindrical through holes h1, h2, h3, h4 penetratingthrough the main block 364 b 1/A in the moving direction. The rodmembers R1, R2, R3, R4 of the present embodiment are members having thesame configuration. It is noted that a main block 364 b 1/B of theB-type carriage 3641/B has the same configuration as the main block 364b/A. Accordingly, the description of the main block 364 b 1/B is hereinomitted.

In the present embodiment, the main block 364 b 1/A is a metal member(e.g., stainless steel), and the end blocks 364 b 2 and the rod membersR1, R2, R3, R4 are resin members. It is noted that materials of each ofthe members configuring the A-type carriage 364 b/A is not limited tothose of the present embodiment, and can be properly selected frommetals, resins, ceramics or every types of composite materials (e.g.,fiber reinforced plastic).

As shown in FIG. 17, on each of both side faces of the rail 364 a (rightside face SR, left side face SL), two streaks of grooves Ga extending inthe length direction are formed close to each other. Also, on each ofthe left and right portions of the top face of the rail 364 a (right topface TR, left top face TL), two streaks of grooves Ga extending in thelength direction are formed close to each other.

On the other hand, on the main block 364 b 1/A of the A-type carriage364 b/A, eight streaks (two streaks×four sets) of grooves Gb are formedat positions opposing each of the grooves Ga. By the pairs of thegrooves Ga and the grooves Gb opposing to each other, load paths Pa (P1a, P2 a, P3 a, P4 a) and load paths Pb (P1 b, P2 b, P3 b, P4 b) areformed. It is noted that a load path refers to a portion among a path ofthe rolling bodies where a load acts on the rolling bodies.

The load paths P1 a and P1 b (load path pair P1) are formed close toeach other between the right side face SR of the rail 364 a and the mainblock 364 b 1/A. The load paths P2 a and P2 b (load path pair P2) areformed close to each other between the right top face TR of the rail 364a and the main block 364 b 1/A. The load paths P3 a and P3 b (load pathpair P3) are formed close to each other between the left top face TL ofthe rail 364 a and the main block 364 b 1/A. The load paths P4 a and P4b (load path pair P4) are formed close to each other between the leftside face SL of the rail 364 a and the main block 364 b 1/A. The pair ofpaths for the rolling bodies that are formed in parallel and close toeach other as described above will be hereinafter referred to as a “pathpair.”

Also, between the right side face SR, right top face TR, left top faceTL and left side face SL of the rail 364 a and the main block 364 b 1/A,gaps P1 c, P2 c, P3 c, P4 c are respectively formed. The load path pairsP1, P2, P3, P4 are respectively formed in the gaps P1 c, P2 c, P3 c, P4c.

The four through holes h1, h2, h3, h4 are formed in parallel with and atpositions opposing the respective four load path pairs P1, P2, P3, P4.

Through holes Qc (Q1 c, Q2 c, Q3 c, Q4 c) having substantiallyrectangular cross sectional shapes pass through the rod members R1. R2,R3, R4 in the length directions, respectively. On an inner peripheralsurface of each through hole Qc (specifically, two surfaces opposingwith a narrow interval), no-load paths Qa (Q1 a, Q2 a, Q3 a, Q4 a) andQb (Q1 b, Q2 b, Q3 b, Q4 b) consisting of two opposing pairs of groovesGc, Gd (Reference signs are indicated only to the through hole Q2 c.)extending in the extending direction of the through hole Qc are formed.

As shown in FIG. 18, on each of both ends of the rod member R3, anU-shaped protruding part R3 p protruding from a through hole h3 of themain block 364 b 1/A is provided. On an outer peripheral surface of eachprotruding part R3 p, the above mentioned pair of parallel grooves Gc isformed. On the other rod members R1, R2, R4, protruding parts Rip, R2 p,R4 p (not shown), each formed with a pair of the U-shaped grooves Gc,are respectively provided as well.

On the end block 364 b 2, four recessed parts D1, D2, D3, D4 (Only therecessed part D3 is shown in the drawings.) configured to accommodaterespective protruding parts Rp (R1 p, R2 p, R3 p, R4 p) are formed. Onthe recessed part D3, a pair of grooves Gd respectively opposing thepair of grooves Gc formed on the protruding part R3 p is formed. By thetwo pairs of grooves Gc, Gd opposing to each other, Two U-shaped turningpaths U3 a, U3 b (Only the path U3 a is shown in the drawings.) areformed. Similarly, a pair of the grooves Gd is formed on each of theother three recessed parts D1, D2, D4 as well, and a pair of turningpaths U1 a and U1 b, a pair of turning paths U2 a and U2 b, and a pairof turning paths U4 a and U4 b are formed between respective pairs ofgrooves Gc formed on the protruding parts Rip, R2 p, R4 p.

Also, between the protruding parts R1 p, R2 p, R3 p, R4 p and therecessed parts D1, D2, D3, D4, gaps Gu1, Gu2, Gu3, Gu4 (not shown) arerespectively formed. The turning paths U1 a and U1 b, the turning pathsU2 a and U2 b, the turning paths U3 a and U3 b, and the turning paths U4a and U4 b are respectively formed in the gaps Gu1, Gu2, Gu3, Gu4.

One end of each of the turning paths Ua, Ub is connected to the loadpath Pa, Pb, and the other end is connected to the no-load path Qa, Qb,respectively. That is, eight streaks of the load paths P1 a, P1 b, P2 a.P2 b, P3 a, P3 b. P4 a, P4 b and eight streaks of the no-load paths Q1a, Q1 b, Q2 a, Q2 b, Q3 a, Q3 b, Q4 a, Q4 b are connected to form loopsby the eight turning paths U1 a, U1 b, U2 a, U2 b, U3 a, U3 b, U4 a, U4b, thereby forming eight circulating passages.

Also, the gaps Pc (P1 c, P2 c, P3 c, P4 c) and the through holes Qc (Q1c, Q2 c, Q3 c, Q4 c) are connected to form loops by the pairs ofU-shaped gaps Gu (Gu1, Gu2, Gu3, Gu4), thereby forming four annular gapsCG. To these four annular gaps CG, the above described four pairs (eightstreaks) of circulating passages CP are respectively formed.

To each of the eight streaks of circulating passages CP, a plurality ofballs RE (rolling bodies) made of stainless steel are accommodated whilealigned in a line. Also, a retainer RT in the form of one endless beltis inserted in each of the four annular gaps CG.

FIG. 19 is a perspective view showing a portion of the retainer RT. Theretainer RT is a flexible resin member, and a plurality of through holesRTh are formed at regular intervals in two rows in the length direction.An interval between the two rows of the through holes RTh is the same asan interval between the two streaks of circulating passages CP (passagepair) provided in each annular gap CG. In the two rows of the throughholes RTh of the retainer RT, each of a plurality of the balls REarranged in the passage pair within the same annular gap CG is rotatablyfitted. Then, the retainer RT circulates within the annular gap CGtogether with a plurality of the balls RE. The retainer RT prevents theballs RE from contacting with each other and thereby reduces vibrationnoises caused by frictions between the balls RE and abrasion of theballs RE.

As shown in FIG. 14, a length L of the A-type carriage 364 b/A (andB-type carriage 364 b/B) of the present embodiment is set to be equal toor less than 125 mm (about 120 mm) and thereby an aspect ratio (a ratioL/W of the length L and a width W) is suppressed to be equal to or lessthan 1.35 (about 1.32).

If the carriage is long, a motion accuracy (waving characteristic andthe like) and a rigidity improve, but there is an disadvantage that themass increases and the oscillating (accelerating) performance degrades.Preferably, the length L of the eight-streak type carriage to be used inthe oscillating device is within the range of 70-160 mm (morepreferably, within the range of 90-140 mm, and further preferably,within the range of 110-130 mm).

Also, the aspect ratio L/W is better to be near 1 so that theoscillating performances becomes uniform in every axis directions.Preferably, the aspect ratio L/W of the eight-streak type carriage suchas the one in the present embodiment is within the range of 0.65-1.5(more preferably, within the range of 0.7-1.4, and further preferably,within the range of 0.75-1.35).

By coupling the Z-axis oscillating unit 300 and the vibrating table 400via the XY slider 360 capable of sliding in the X-axis direction and theY-axis direction with small resistance as described above, vibrationcomponents of the vibrating table 400 in the X-axis direction and theY-axis direction will not be transmitted to the Z-axis oscillating unit300 even if the vibrating table 400 is vibrated in the X-axis directionand the Y-axis direction by the X-axis oscillating unit 100 and theY-axis oscillating unit 200, respectively.

Also, forces in the X-axis direction and the Y-axis direction hardly acton the vibrating table 400 by the driving of the Z-axis oscillating unit300. Therefore, oscillation with less crosstalk becomes possible.

Also, as described above, in the A-type linear guide 364A of the presentembodiment, the number of streaks of the circulating passages CP is setto eight which is twice the ordinary number of streaks by decreasing theouter diameter of the ball RE to about a half the ordinary outerdiameter. Furthermore, the number of balls RE arranged in the load pathsis also increased to nearly twice the ordinary number of balls RE. As aresult, the A-type carriage 364 b/A is more dispersedly supported byequal to or more than twice (nearly four times) the conventional numberof balls RE. As a result, improvement in the rigidity and improvement inthe motion accuracy (lowering of wavings) are realized.

Since the use of eight-streak type linear guides such as the A-typelinear guide 364A had been limited to the use for the purpose ofimproving positional accuracies in machine tools or the like,conventional eight-streak type linear guides have large carriage lengthsL of equal to or more than 180 mm, and their aspect ratios are equal toor more than 2.3 indicating that they have bad weight balances. As aresult, the conventional eight-streak type linear guides had not beensuitable for mechanisms such as oscillating devices which are driven athigh speeds. The A-type linear guide 364A (B-type linear guide 364B) ofthe present embodiment is made such that the eight-streak type linearguide becomes applicable to oscillating devices by making the carriagelength L and the aspect ratio smaller. Also, oscillations withfrequencies over 2 kHz, which were conventionally difficult, have becomepossible by the use of the A-type linear guide 364A.

Next, a configuration of the YZ slider 160 which couples the X-axisoscillating unit 100 and the vibrating table 400 will be described.

FIG. 20 is a side view of the X-axis oscillating unit 100 and thevibrating table 400.

FIG. 21 is a front view of the X-axis oscillating unit 100.

FIG. 22 is a front view of the YZ slider 160.

FIG. 23 is a plan view around the vibrating table 400.

As shown in FIG. 20, the YZ slider 160 includes a coupling arm 162 fixedto a tip face of the movable part 120 (expansion frame 124) of theX-axis oscillating unit 100, and a cross guide part 164 coupling thecoupling arm 162 and the vibrating table 400 slidably in the y-axisdirection and the Z-axis direction.

As shown in FIG. 22, the cross guide part 164 includes two Y-axis rails164 a/Y (164 a/Y1, 164 a/Y4), six Z-axis rails 164 a/Z (164 a/Z1, 164a/Z2, 164 a/Z3, 164 a/Z4, 164 a/Z5, 164 a/Z6), and six cross carriages164 b (164 b/1, 164 b/2, 164 b/3, 164 b/4, 164 b/5, 164 b/6) whichcouple the Y-axis rails 164 a/Y and the Z-axis rails 164 a/Z slidably inthe Y-axis direction and the Z-axis direction. The six cross carriages164 b are arranged in a lattice (Y-axis direction: three rows, Z-axisdirection: two rows). It is noted that the cross carriages 164 b/2, 164b/3, 164 b/4, 164 b/5, 164 b/6 have the same configuration as the crosscarriage 164 b/1. Accordingly, the descriptions of the cross carriages164 b/2, 164 b/3, 164 b/4, 164 b/5, 164 b/6 and their Y-axis carriages164 b/Y2, 164 b/Y3, 164 b/Y4, 164 b/Y5, 164 b/Y6 and Z-axis carriages164 b/Z2, 164 b/Z3, 164 b/Z4, 164 b/Z5, 164 b/Z6 are herein omitted.Also, a cross carriage 264 b/1 has the same configuration as the crosscarriage 164 b/1. Accordingly, the descriptions of the cross carriage264 b/1 and its X axis rail 264 a/X1, Z-axis rail 264 a/Z1, X-axiscarriage 264 b/X1 and Z-axis carriage 264 b/Z1 are herein omitted.Furthermore, a coupling arm 262 fixed to a tip face of a movable part220 of the horizontal actuator 200A has the same configuration as thecoupling arm 162.

Three Z-axis rails 164 a/Z1, 164 a/Z2, 164 a/Z3 on the upper row and oneY-axis rail 164 a/Y4 on the lower row are fixed to the tip face of thecoupling arm 162. Also, the remaining three Z-axis rails 164 a/Z4, /Z5,/Z6 on the lower row and one Y-axis rail 164 a/Y1 on the upper row arefixed to a side face of the vibrating table 400.

The cross carriage 164 b/1 is a cross carriage in which the Y-axiscarriage 164 b/Y1 which engages with the Y-axis rail 164 a/Y1 and aZ-axis carriage 164 b/Z1 which engages with the Z-axis rail 164 a/Z1 aresuperimposed back to back (i.e., the top faces of the carriages aresuperimposed with each other) and fixed. One of the Y-axis carriage 164b/Y1 and the Z-axis carriage 164 b/Z1 has the same configuration as theabove-described A-type carriage 364 b/A, and the other has the sameconfiguration as the above-described B-type carriage 364 b/B. Similarlyto the cross carriage of the crossguide 364, the Y-axis carriage 164b/Y1 and the Z-axis carriage 164 b/Z1 are directly fixed together onlywith four bolts without using an attaching plate.

All the three cross carriages 164 b/1, 164 h 2, 164 b/3 on the upper rowengage with one Y-axis rail 164 a/Y1 on the upper row, and engage withthree Z-axis rails 164 a/Z1, 164 a/Z2, 164 a/Z3 on the upper row,respectively.

Similarly, all the three cross carriages 164 b/4, 164 b/5, 164 b/6 onthe lower row engage with one Y-axis rail 164 a/Y4 on the lower row, andengage with three Z-axis rails 164 a/Z4, 164 a/Z5, 164 a/Z6 on the lowerrow, respectively.

The vibrating table 400 is coupled to the movable part 120 of the X-axisoscillating unit 100 slidably in the Y-axis direction and the Z-axisdirection by the configuration of the YZ slider 160 described above.

By coupling the X-axis oscillating unit 100 and the vibrating table 400via the YZ slider 160 capable of sliding in the Y-axis direction and theZ-axis direction with small resistance as described above, vibrationcomponents of the vibrating table 400 in the Y-axis direction and theZ-axis direction will not be transmitted to the X-axis oscillating unit100 even if the vibrating table 400 is vibrated in the Y-axis directionand the Z-axis direction by the Y-axis oscillating unit 200 and theZ-axis oscillating unit 300, respectively.

Also, forces in the Y-axis direction and the Z-axis direction hardly acton the vibrating table 400 by the driving of the X-axis oscillating unit100. Therefore, oscillation with less crosstalk becomes possible.

Furthermore, the ZX slider 260 which couples the Y-axis oscillating unit200 and the vibrating table 400 also has the same configuration as theYZ slider 160, and the vibrating table 400 is coupled to the movablepart 220 of the Y-axis oscillating unit 200 slidably in the Z-axisdirection and the X-axis direction. Therefore, vibration components ofthe vibrating table 400 in the Z-axis direction and the X-axis directionwill not be transmitted to the Y-axis oscillating unit 200 even if thevibrating table 400 is vibrated in the Z-axis direction and the X-axisdirection by the Z-axis oscillating unit 300 and the X-axis oscillatingunit 100, respectively.

Also, forces in the Z-axis direction and the X-axis direction hardly acton the vibrating table 400 by the driving of the Y-axis oscillating unit200. Therefore, oscillation with less crosstalk becomes possible.

As described above, the oscillating units 100, 200, 300 can accuratelyoscillate the vibrating table 400 in respective driving directionswithout interfering with each other. Also, since the movable parts ofthe oscillating units 100, 200, 300 are supported movably only in theirdriving directions by the movable part support mechanisms 140, 240, 340,respectively, the oscillating units 100, 200, 300 hardly vibrate in thenon-driving directions. Therefore, uncontrolled vibrations in thenon-driving directions do not act on the vibrating table 400 from theoscillating units 100, 200, 300. Accordingly, vibration of the vibratingtable 400 in each axis direction is accurately controlled by the drivingof the corresponding one of the oscillating units 100, 200, 300.

The vibrating table 400 is configured such that its center of gravitysubstantially coincides with the center of its outer dimension so as tosuppress occurrence of unnecessary rotational motion (rotationalvibration). However, if the biaxial sliders (YZ slider 160, ZX slider260, XY slider 360) are attached to one side of the vibrating table 400in each axis direction, since portions of the biaxial sliders are fixedto the vibrating table 400 (more precisely, portions of the biaxialsliders are restrained by the vibrating table 400 and move along withthe vibrating table 400), the center of gravity of the oscillatedportion (the vibrating table 400 and the portions of the biaxialsliders) shifts from the center of the vibrating table 400. This bias inthe center of gravity of the oscillated portion causes rotationalvibration of the vibrating table 400 and, as a result, causes variationsin vibrating states (e.g., acceleration) according to positions on thevibrating table 400.

In consideration of the above, in the present embodiment, counterbalancers which compensate the ambalance caused by the biaxial slidersare provided to the vibrating table 400 on the opposite sides of thebiaxial sliders such that the center of gravity of the oscillatedportion (the vibrating table 400, the counter balancers and the portionsof the biaxial sliders) substantially coincides with the center of thevibrating table 400.

As shown in FIGS. 1-3 and FIGS. 5-7, on a side face of the vibratingtable 400 opposite to the side face on which the YZ slider 160 isattached (i.e., the side face on the X-axis positive direction side), anX-axis counter balancer 610 (first counter balancer) is provided.

Also, on a side face of the vibrating table 400 opposite to the sideface on which the ZX slider 260 is attached (i.e., the side face on theY-axis positive direction side), a Y-axis counter balancer 620 (secondcounter balancer) is provided. It is noted that the Y-axis counterbalancer 620 of the present embodiment has the same configuration as theX-axis counter balancer 610.

Furthermore, on a top face of the vibrating table 400 opposite to thelower face on which the XY slider 360 is attached (i.e., the side faceon the Z-axis positive direction side), a Z-axis counter balancer 630(third counter balancer) is provided.

FIG. 25 is a sectional view of the X-axis counter balancer 610 (and theY-axis counter balancer 620). It is noted that the X-axis counterbalancer 610 includes a cushioning layer 611 (cushioning part) and aweight plate 612 (weight part). The cushioning layer 611 is pinchedbetween the weight plate 612 and the side face of the vibrating table400 and fastened.

The weight plate 612 is a member for providing a mass for compensatingan imbalance of the oscillated portion caused by the attachment of thebiaxial slider to the vibrating table 400. It is noted that theimbalance of the oscillated portion may represent an uneven distributionof weight in the oscillated portion. A thickness t of the weight plate612 of the present embodiment is 20 mm.

The cushioning layer 611 blocks transmission of vibration noises withfrequencies higher than an oscillating frequency between the weightplate 612 and the vibrating table 400. Also, the cushioning layer 611prevents occurrence of chattering between the vibrating table 400 andthe weight plate 612.

The weight plate 612 and the cushioning layer 611 are attached to theside face of the vibrating table 400 with a plurality of bolts 613.Tapped holes 400 h are formed on the side face of the vibrating table400, and through holes 612 c are formed on the weight plate 612. Theweight plate 612 and the cushioning layer 611 are fastened to the sideface of the vibrating table 400 by inserting the bolts 613 in thethrough holes 612 c and screwing them in the tapped holes 400 h. It isnoted that through holes communicating with the through holes 612 c andthe screw holes 400 h are formed on the cushioning layer 611 as well.

As shown in FIG. 33A, on the X-axis counter balancer 610, a plurality ofthrough holes 612 c are formed in a lattice point in two orthogonaldirections (Y-axis direction and Z-axis direction) at regular intervalsP. In the present embodiment, the intervals P between the through holes612 c are 50 mm. The occurrence of the chattering can be effectivelysuppressed by shortening the intervals P between the through holes 612 c(by setting the intervals P preferably to equal to or less than 100 mm,and more preferably to equal to or less than 50 mm).

Next, a configuration of the Z-axis counter balancer 630 will bedescribed. FIG. 26 is a sectional view of the Z-axis counter balancer630. Also, FIG. 27 is an enlarged plan view showing bolt fixingpositions of the Z-axis counter balancer 630. It is noted that FIG. 26 asectional view in J-J of FIG. 27.

The Z-axis counter balancer 630 includes a first cushioning layer 631(first cushioning part), a first weight plate 632 (first weight part), asecond cushioning layer 634 (second cushioning part), a second weightplate 635 (second weight part), a third cushioning layer 637 (thirdcushioning part), and a third weight plate 638 (third weight part). Thefirst cushioning layer 631, the first weight plate 632, the secondcushioning layer 634, the second weight plate 635, the third cushioninglayer 637 and the third weight plate 638 are stacked on the top face ofthe vibrating table 400 in this order.

The first weight plate 632, the second weight plate 635 and the thirdweight plate 638 are members for providing masses for compensating theimbalance of the oscillated portion caused by the attachment of thebiaxial slider to the vibrating table 400 and, in the presentembodiment, they are plate members made of aluminium alloy. In thepresent embodiment, thicknesses t1, t2, t3 of the first weight plate632, the second weight plate 635 and the third weight plate 638 are 30mm, 20 mm and 10 mm, respectively. It is noted that a width (X-axisdirection) and a depth (Y-axis direction) of the vibrating table 400 ofthe present embodiment are 500 mm, and a width and a depth of the Z-axiscounter balancer 630 are 400 mm.

The first cushioning layer 631, the second cushioning layer 634 and thethird cushioning layer 637 lower transmission of vibration noises withfrequencies higher than an oscillating frequency between the firstweight plate 632 and the vibrating table 400 or between adjacent weightplates 632, 635, 638, respectively. Also, the first cushioning layer631, the second cushioning layer 634 and the third cushioning layer 637prevent occurrence of chatterings between the vibrating table 400 andthe first weight plate 632 or between adjacent weight plates 632, 635,638.

On the first weight plate 632, a plurality of through holes 632 c and aplurality of tapped holes 632 t are respectively formed in latticepoints in two orthogonal directions (X-axis direction and Y-axisdirection) at regular intervals (in the present embodiment, at intervalsP which are the same as those for the through holes 612 c of the X-axiscounter balancer 610). It is noted that, as shown in FIG. 27, positionsof the through holes 632 c and the tapped holes 632 t are shifted by P/2in each arranging direction. That is, in the plan view, the tapped hole632 t is formed at an intermediate position of four through holes 632 c.The first weight plate 632 and the first cushioning layer 631 arefastened to the top face of the vibrating table 400 by inserting bolts633 in the through holes 632 c and screwing them in tapped holes 400 hformed on the top face of the vibrating table 400.

On the second weight plate 635, a plurality of through holes 635 c and aplurality of tapped holes 635 t are respectively formed in latticepoints in two orthogonal directions (X-axis direction and Y-axisdirection) at regular intervals P as well. Positions of the throughholes 635 c and the tapped holes 635 t are shifted by P/2 in eacharranging direction. The second weight plate 635 and the secondcushioning layer 634 are fastened to a top face of the first weightplate 632 by inserting bolts 636 in the through holes 635 c and screwingthem in the tapped holes 632 t formed on the top face of the firstweight plate 632.

On the third weight plate 638, only through holes 638 c are formed. Thethird weight plate 638 and the third cushioning layer 637 are fastenedto a top face of the second weight plate 635 by inserting bolts 639 inthe through holes 638 c and screwing them in the tapped holes 635 tformed on the top face of the second weight plate 635.

As described above, by stacking three layers of the weight plates andthe cushioning layers, the Z-axis counter balancer 630 is made capableof effectively suppressing vibration noises even if a specimen, being aheavy load, are put on the Z-axis counter balancer 630.

Also, by adopting the configuration in which adjacent weight plates (thefirst weight plate 632 and the second weight plate 635, the secondweight plate 635 and the third weight plate 638) are sequentiallyindividually fixed with the bolts instead of fixing the three layers ofthe weight plates and the cushioning layers to the vibrating table 400directly with one bolt (co-fastening), transmission of vibration noisesfrom the vibrating table 400 to the third weight plate 638 iseffectively suppressed.

The shape of each of the weight plates 612, 632, 635, 638 is not limitedto the rectangular flat plate shape, but can be formed in variousshapes. For example, by making the shape to correspond to the shape(mass distribution) of the biaxial sliders, it becomes possible tocompensate the imbalance with high accuracy.

Also, the thickness of each of the weight plates 632, 635, 638 may bechanged in accordance with a mass of the specimen, oscillatingconditions or the like. For example, the thicknesses of all the weightplates 632, 635, 638 may be made the same. Also, the thicknesses of theweight plates may be made thicker as the layer goes up, or theintermediate weight plate 635 may be made the thickest.

Also, as materials for each of the weight plates 612, 632, 635, 638,besides typical structure materials such as aluminium alloys or steel,lead, copper, metal foams, resins (including plastics and rubbers),fiber reinforced plastics or the like having vibration absorbingproperty may be used.

The thickness of each of the cushioning layers 611, 631, 634, 637 isdecided within the range of 0.5 mm to 2 mm in accordance with masses ofthe weight plates, materials and characteristics of the cushioninglayers, a size of the oscillating device 1, test conditions or the like.If the cushioning layers are made too thick, the weight plates becomeprone to resonate and oscillating performances at low frequency rangesdegrade. Furthermore, if the cushioning layers are made too thin, enoughvibration noise suppressing effect cannot be obtained.

For the cushioning layers 611, 631, 634, 637, sheets of variousmaterials such as various synthetic resins (e.g., plastics such aspolyolefin, polyvinyl chloride, polyamide, PEEK (polyether etherketone), polycarbonate and polytetrafluoroethylene), various elastomers(vulcanized rubbers such as natural rubbers and various syntheticrubbers, thermosetting elastomers such as urethane rubbers and siliconerubbers, and thermoplastic elastomers), silicone gel (low crosslinkingdensity silicone resins), various polymer alloys, fiber reinforcedplastics, resin foams, soft metals such as lead, and metal foams or felt(nonwoven fabrics) may be used.

Also, the cushioning layers may be formed by providing gaps between thevibrating table 400 and the weight plates 612, 632 (or between adjacentweight plates 632, 635, 638) and filling the gaps with adhesives orclaking materials and curing them.

Also, the Z-axis counter balancer 630 of the present embodiment has theconfiguration in which three layers of the cushioning layers and theweight plates are alternately laminated, but may have a configuration inwhich two layers or four or more layers are laminated. Furthermore, thematerials and/or the thicknesses of the cushioning layers and/or theweight plates may be changed for each layer.

Next, oscillation uniformity of the oscillating device 1 of the presentembodiment will be described. FIGS. 28A, 28B, 29A, 29B, 30A and 30B aregraphs showing relative acceleration spectrum characteristics measuredat four points on the vibrating table 400 (more precisely, on the Z-axiscounter balancer 630). Also, FIG. 31 is a diagram showing monitoringpoints (acceleration measurement points) on the Z-axis counter balancer630.

The oscillating device 1 is designed such that a reference point MP0,which is at the center of the top face of the Z-axis counter balancer630, vibrates in the same acceleration as the indicated value (i.e., asingle-point control is executed on the basis of a measured accelerationvalue at the reference point MP0). It is noted that an oscillatingdevice may be configured to execute a multi-point control in whichvibration is controlled on the basis of measurement results ofparameters indicating vibration states, such as acceleration, at two ormore points among five monitoring points including the reference pointMP0 (e.g., on the basis of an average of measured values at a pluralityof monitoring points). The oscillation uniformity of the oscillatingdevice 1 was evaluated by measuring relative acceleration levels La inareas at four corners of the Z-axis counter balancer 630 (monitoringpoints MP1, MP2, MP3, MP4) where it is thought that differences inaccelerations from an acceleration at the reference point MP0 are thelargest. It is noted that the relative acceleration level La is arelative acceleration level at each of the monitoring points MP1-MP4relative to the acceleration at the reference point MP0, and is definedby the following Equation 1.

La=20 log a/a ₀ [dB]  [Expression 1]

where

La represents relative acceleration level at each monitoring point,

a represents acceleration at each monitoring point (MP1-MP4), and

a₀ represents acceleration at reference point MP0.

Also, As shown in FIG. 31, the monitoring points MP1, MP2, MP3, MP4 areset at the centers of four areas at four corners among 16 areas obtainedby dividing the top face of the Z-axis counter balancer 630 in a latticeof 4×4.

Also, the evaluation of the oscillation uniformity was carried out inevery oscillating directions (X-axis direction, Y-axis direction, Z-axisdirection) for each of the case where oscillation is performed using asine wave and a case where oscillation is performed using a random wave.

FIGS. 28A and 28B, FIGS. 29A and 29B, and FIGS. 30A and 30B are graphsshowing measurement results of X-axis direction. Y-axis direction andZ-axis direction, respectively. FIGS. 28A, 29A and 30A are measurementresults for the case where oscillation was performed using the sinewave, and FIGS. 28B, 29B and 30B are measurement results for the casewhere oscillation was performed using the random wave. It is noted thatthe measurement with the sine wave was carried out within the frequencyrange of 200-2000 Hz, and the measurement with the random wave wascarried out within the frequency range of 5-2000 Hz.

As shown in FIGS. 28A, 28B, 29A, 29B, 30A and 30B, in all conditions, ina frequency range equal to or less than 1 kHz, the relative accelerationlevels were suppressed to less than ±3 dB. Also, in a frequency rangeequal to or less than 2 kHz, the relative acceleration levels weresuppressed to less than ±6 dB apart from those for some measurementconditions, and the relative acceleration levels were suppressed to lessthan ±10 dB for all measurement conditions. In a state where the counterbalancers are not attached, in a frequency range equal to or less than 2kHz, the relative acceleration levels exceeded ±10 dB for allmeasurement conditions, and thus a remarkable improvement in theoscillation uniformity by the attachment of the counter balancers wasconfirmed.

FIG. 32 is a sectional view of the first variation 610A of the X-axiscounter balancer 610. In this variation 610A, spacers 611 a (e.g., flatwashers) are used in place of the cushioning layer 611. Apart fromfixing points where the spacers 611 a intervene, a gap is providedbetween the weight plate 612 and the vibrating table 400 and thereby theweight plate 612 is held on the vibrating table 400 in a contactlessmanner. Therefore, it is made difficult for the vibration to betransmitted between the vibrating table 400 and the weight plate 612.Furthermore, the occurrence of chattering between the vibrating table400 and the weight plate 612 is also prevented.

For the spacer 611 a, in addition to various steels such as stainlesssteel and various nonferrous metals such as aluminium alloys, copperalloys such as brass, and titanium alloys, the above-mentioned materialsthat can be used for the cushioning layer 611 can be used.

Also, the spacers 611 a may be formed integrally with the vibratingtable 400 or the weight plate 612 as protruding portions in the form ofbosses. Furthermore, a filler (e.g., silicone resin) may be filled inthe gap between the vibrating table 400 and the weight plate 612.

Also, one or more of the cushioning layers 631, 634, 637 of the Z-axiscounter balancer 630 may be changed to the spacers 611 a.

FIGS. 33A, 33B and 33C are external views of the X-axis counterbalancer. FIG. 33A shows the X-axis counter balancer 610 of the firstembodiment, and FIG. 33B and FIG. 33C show the second variation 610B andthe third variation 610C, respectively. The X-axis counter balancer 610of the first embodiment is integrally formed from one weight plate 612(and one cushioning layer 611). In contrast, in the second variation610B shown in FIG. 33B, the weight plate 612 and the cushioning layer611 are divided into four pieces in the length direction (right-leftdirection in the drawing). Furthermore, in the third variation 610Cshown in FIG. 33C, the weight plate 612 and the cushioning layer 611 arefurther dived into two pieces in the width direction (up-down directionin the drawing) and thus are divided into 8 pieces in total. By dividingthe X-axis counter balancer 610 into small elements, the resonancefrequency increases and thereby the occurrence of vibration noises inthe test frequency range is reduced. It is noted that the configurationof the first variation 610A may be applied to the second variation 610Band the third variation 610C.

Also, in the present embodiment, the X-axis counter balancer 610, theY-axis counter balancer 620 and the Z-axis counter balancer 630 are allattached to the outer surface of the vibrating table 400, but one ormore of them may be attached to the inside of the vibrating table 400.

Also, in the present embodiment, the vibrating table 400 itself does nothave imbalance, but an initial imbalance may be provided to thevibrating table 400 in advance such that the vibrating table 400 isbalanced in the state where the biaxial sliders are attached (i.e., thecenter of gravity of the oscillated portion coincides with the center ofthe outer shape of the vibrating table). The initial imbalance can beprovided by, for example, making thicknesses of the box-shaped vibratingtable and/or arrangements of reinforcing ribs inside the vibrating tableuneven (See FIGS. 54 and 55. In the vibrating table 400 shown in FIGS.54 and 55, additional ribs 430′ are added to make the arrangements ofreinforcing ribs uneven.).

Next, configurations for attaching the fixing parts of the oscillatingunits to the device base 500 will be described.

As shown in FIGS. 1-3 and FIGS. 5-7, the fixing part 310 of the Z-axisoscillating unit 300 is attached to a top face of the device base 500via a pair of supporting units 350 (also referred to as fixing partsupport mechanisms, floating mechanisms or elastic support mechanisms)arranged on both sides of the Z-axis oscillating unit 300 in the Y-axisdirection.

As shown in FIG. 5 and FIG. 7, each supporting unit 350 includes amovable block 358, a pair of angle plates (fixing blocks) 352 and a pairof linear guides 354. The movable block 358 is a supporting member fixedon a side face of the fixing part 310 of the Z-axis oscillating unit300, and has portions 358 a, 358 b and 358 c. The angle plates 352 ofthe pair are arranged to respectively oppose both end faces of themovable block 358 in the X-axis direction, and are fixed on the top faceof the device base 500. Both ends of the movable block 358 in the X-axisdirection and the respective angle plates 352 are respectively coupledslidably in the Z-axis direction by the linear guides 354.

The linear guide 354 includes a rail 354 a and a carriage 354 b whichengages with the rail 354 a. On each of both end faces of the movableblock 358 in the X-axis direction, the rail 354 a is attached. Also, tothe angle plate 352, the carriage 354 b which engages with the opposingrail 354 a is attached. Furthermore, between the movable block 358 andthe device base 500, a pair of air springs 356 is placed while beingarranged in the X-axis direction, and the movable block 358 is supportedby the device base 500 via the pair of air springs 356.

Since, as described above, the fixing part 310 of the Z-axis oscillatingunit 300 is elastically supported with respect to the device base 500 inthe driving direction (Z-axis direction) by the supporting unit 350including the linear guides 354 and the air springs 356, strong reactionforces (oscillating forces) acting on the fixing part 310 in the Z-axisdirection during the driving of the Z-axis oscillating unit 300 are notdirectly transmitted to the device base 500, but high frequencycomponents are especially largely attenuated by the air springs 356.Therefore, vibration noises transmitted to the vibrating table 400 fromthe Z-axis oscillating unit 300 via the device base 500 and the otheroscillating units 100, 200 are largely reduced.

As shown in FIGS. 20-21, the fixing part 110 of the horizontal actuator100A is attached on the top face of the device base 500 via a pair ofsupporting units 150 arranged at both sides of the X-axis oscillatingunit 100 in the Y-axis direction. Each of the supporting units 150includes an inverse T-shaped fixing block 152 fixed on the top face ofthe device base 500, a substantially rectangular movable block 158attached to a side face of the fixing part 110 of the X-axis oscillatingunit 100, a linear guide 154 that couples the fixing block 152 and themovable block 158 slidably in the X-axis direction, and a springmechanism 156 that elastically couples the movable block 158 and thefixing block 152.

The linear guide 154 includes a rail 154 a extending in the X-axisdirection and attached on a top face of the fixing block 152, and a pairof carriages 154 b attached on a lower face of the movable block 158 andthat engage with the rail 154 a. Also, on a side face of the fixingblock 152 in the X-axis negative direction side, an L-shaped arm 155extending upwardly is fixed. The movable block 158 and the arm 155 arecoupled by the spring mechanism 156.

FIG. 24 is an enlarged side view around the spring mechanism 156 of thesupporting unit 150. The spring mechanism 156 includes a bolt 156 a, afixing plate 156 b, a ring 156 c, a nut 156 d, a anti-vibration spring156 e, a cushion plate 156 f, a washer 156 g and nuts 156 h. On a topportion of the arm 155, a through hole 155 h extending in the X-axisdirection is provided, and the bolt 156 a is inserted in this throughhole 155 h. A tip of the bolt 156 a is fixed to the movable block 158via the fixing plate 156 b. Also, a tip portion of the bolt 156 a runsthrough the tubular ring 156 c.

The ring 156 c is fixed by nipping between the nut 156 d, screwed to thebolt 156 a, and the fixing plate 156 b. Also, a tip side of the bolt 156a is inserted in a hollow part of the tubular anti-vibration spring 156e. The anti-vibration spring 156 e is retained by being nipped betweenthe fixing plate 156 b and the arm 155. Also, the ring 156 c is fittedat an end side of the hollow part of the anti-vibration spring 156 e.

It is noted that the anti-vibration spring 156 e is a tubular member inwhich a compression coil spring made of steel is embedded in aviscoelastic body (damper) such as acrylic resins. A simple coil springmay be used in place of the anti-vibration spring 156 e. Also, aseparate damper (e.g., anti-vibration rubber or oil damper) may beprovided serially or parallelly with the coil spring.

At a head side of the bolt 156 a, two nuts 156 h are attached. Also, thebolt 156 a is inserted in through holes respectively provided to thecushion plate 156 f and the washer 156 g. The cushion plate 156 f isretained by being nipped between the washer 156 g and the arm 155supported by the two nuts 156 h. The cushion plate 156 f is, forexample, formed of anti-vibration rubbers or resins such as polyurethane(i.e., rubbery elastic bodies and/or viscoelastic bodies).

A preload (a compressing load in the X-axis direction) is applied to theanti-vibration spring 156 e and the cushion plate 156 f by thetightening of the bolt 156 a, and the horizontal actuator 100A fixed tothe movable block 158 is retained at a neutral position where restoringforces of the anti-vibration spring 156 e and the cushion plate 156 fbalance. That is, the spring mechanism 156 functions as a neutral springmechanism as well.

When the X-axis oscillating unit 100 oscillates the vibrating table 400in the X-axis direction, a reaction force is transmitted to the movableblocks 158 of the supporting units 150, and is further transmitted tothe fixing blocks 152 via the spring mechanisms 156 (anti-vibrationsprings 156 e, cushion plates 156 f) and the arms 155. Since theanti-vibration springs 156 e and the cushion plates 156 f attenuatevibrations with frequencies higher than their low resonance frequencies,transmission of vibration noises from the X-axis oscillating unit 100 tothe device base 500 is suppressed by the supporting units 150.

It is noted that a reaction force acting on the supporting unit 150 inthe X-axis positive direction is smaller than a reaction force in theX-axis negative direction. Therefore, in the present embodiment, a smalland inexpensive cushion plate 156 f is used as an elastic component thatreceives the reaction force in the X-axis positive direction. If thereaction force in the X-axis positive direction becomes large, ananti-vibration spring or a coil spring may be used in place of thecushion plate 156 f. Also, if the reaction forces in both directions aresmall, a cushion plate may be used in place of the anti-vibration spring156 e.

Due to the above configuration, the fixing part 110 of the X-axisoscillating unit is supported softly and elastically with respect to thedevice base 500 in the driving direction (X-axis direction) by thesupporting units 150 each including the linear guide 154 and the springmechanism 156, and thus strong reaction forces (oscillating forces) inthe X-axis direction that acts on the fixing part 110 during the drivingof the X-axis oscillating unit 100 are not transmitted directly to thedevice base 500 but especially high frequency components of the reactionforces are attenuated by the spring mechanisms 156, and the reactionforces are then transmitted to the device base 500. Therefore, vibrationnoises that are transmitted from the X-axis oscillating unit 100 to thevibrating table 400 are reduced.

The Y-axis oscillating unit 200 also includes the horizontal actuator200A that has the same configuration as the horizontal actuator 100A.The fixing part 210 of the horizontal actuator 200A is also supportedelastically on the device base 500 in the Y-axis direction by a pair ofsupporting units 250 (FIG. 2). Since the supporting unit 250 has thesame configuration as the supporting unit 150 of the X-axis oscillatingunit 100, redundant detailed descriptions thereof are herein omitted.

As described above, by adopting a configuration for elasticallysupporting each of the oscillating units 100, 200, 300 with thesupporting units 150, 250, 350 including elastic components (air springsor spring mechanisms), transmissions of especially high frequencycomponents of vibrations (noises) between the oscillating units via thedevice base 500 are suppressed, thereby making it possible to oscillatewith higher accuracy.

It is noted that, on the supporting unit 350 that supports the Z-axisoscillating unit 300, in addition to the dynamic load for oscillatingthe specimen and the vibrating table 400, weights (static loads) of theZ-axis oscillating unit 300, the vibrating table 400 and the specimenact. Therefore, the air spring 356 that is relatively small and capableof supporting a large load is adopted. On the other hand, since thelarge static load does not act on the supporting unit 150 that supportsthe X-axis oscillating unit 100 and the supporting unit 250 thatsupports the Y-axis oscillating unit 200, a coil spring that isrelatively small and has a simple configuration is used.

In the present embodiment, the rotational vibration of the vibratingtable 400 is suppressed by the use of the low waving eight-streak linearguide as the biaxial sliders (YZ slider 160, ZX slider 260, XY slider360) which greatly affect the oscillating performance, and, as a result,uniformity of the vibrating state (acceleration) on the vibrating table400 is remarkably improved. Conventionally, oscillating performancespecifications could only be prescribed at the reference point (thecenter of the top face of the vibrating table). For example, in aconventionally known oscillating device, oscillation with sufficientlyhigh accuracy is possible at a reference point on the vibrating table(e.g., at the center of the top face of the vibrating table), but sincethere are variations in vibrating states depending on locations on thevibrating table, oscillating accuracies at positions other than thereference point are not sufficient. However, due to this improvement inthe uniformity, it is made possible to prescribe the oscillatingperformance specifications within a wide area on the vibrating table.

Furthermore, by positioning the center of gravity of the oscillatedportion (including the vibrating table and portions of the biaxialsliders) at the center of the vibrating table by providing the counterbalancers (or by creating a predetermined imbalance on the vibratingtable in advance), it is made possible to lower the variations invibrations (accelerations) on the vibrating table to equal to or lessthan 3 dB within the frequency range of up to 1 kHz, and equal to orless than about 6 dB within the frequency range of up to 2 kHz.

<Variation of XY Slider>

FIG. 34 is a plan view illustrating a configuration of a variation 360Aof the XY slider. The present variation is an XY slider in which thesecond orientation cross guide 364M2 arranged at the center is removedfrom the XY slider 360 of the above-described first embodiment (FIG.12). In the XY slider 360A of the present variation, the number of thefirst orientation cross guides 364P (cross guides 364M1, 364L2, 364R2,364M3) of which the X-axis linear guides 364X are attached to thevibrating table 400 and the number of the second orientation crossguides 364S (cross guides 364L1, 364R1, 364L3, 364R3) of which theY-axis linear guides 364Y are attached to the vibrating table 400 arethe same.

Now, differences in behaviors of the cross guide 364 depending onoscillating directions will be described. FIG. 35A is a front view ofthe first orientation cross guide 364P, and FIG. 35B is a left side viewthereof.

As shown in FIG. 35A, regarding the first orientation cross guide 364Pof which the X-axis linear guide 364X (X-axis rail 364 a/X) is attachedto the vibrating table 400, when the vibrating table 400 is oscillatedin the X-axis direction, only the X-axis rail 364 a/X (solid lines)fixed to the vibrating table 400 is oscillated in the X-axis directionalong with the vibrating table 400, and the cross carriage 364 c and theY-axis rail 364 a/Y (broken lines) are not oscillated in the X-axisdirection.

On the other hand, as shown in FIG. 35B, regarding the first orientationcross guide 364P, when the vibrating table 400 is oscillated in theY-axis direction, the X-axis rail 364 a/X and the cross carriage 364 c(solid lines) are oscillated in the Y-axis direction along with thevibrating table 400, and only the Y-axis rail 364 a/Y (broken lines) isnot oscillated in the Y-axis direction.

Also, regarding the second orientation cross guide 364S of which theY-axis linear guide 364Y (Y-axis rail 364 a/Y) is attached to thevibrating table 400, contrary to the first orientation cross guide 364Pdescribed above, when the vibrating table 400 is oscillated in theX-axis direction, the Y-axis rail 364 a/Y and the cross carriage 364 c(solid lines) are oscillated in the X-axis direction along with thevibrating table 400, and only the X-axis rail 364 a/X (broken lines) isnot oscillated in the X-axis direction. Also, when the vibrating table400 is oscillated in the Y-axis direction, only the Y-axis rail 364 a/Y(solid lines) is oscillated in the Y-axis direction along with thevibrating table 400, and the cross carriage 364 c and the X-axis rail364 a/X (broken lines) are not oscillated in the Y-axis direction.

Table 1 is a table in which relationships between the attachingorientations of the cross guide 364, the oscillating directions of thevibrating table, and oscillated parts of the cross guide 364 (componentsof the cross guide 364 which are oscillated along with the vibratingtable 400) described above are organized.

TABLE 1 oscillated parts of cross guide cross guide X-axis directionY-axis direction attaching orientation oscillation oscillation firstorientation X-axis rail X-axis rail cross guide Cross carriage secondorientation Y-axis rail Y-axis rail cross guide cross carriage

As described above, portions of the cross guide 364 which are oscillatedalong with the vibrating table 400 differ depending on the oscillatingdirection and the attaching orientation. For example, when the vibratingtable 400 is oscillated in the X-axis direction, as described above,regarding the first orientation cross guide 364P, only the X-axis rail364 a/X is oscillated in the X-axis direction, but regarding the secondorientation cross guide 364S, the Y-axis rail 364 a/Y and the crosscarriage 364 c are oscillated in the X-axis direction. Furthermore, therelationships between the oscillating direction and the number ofcomponents of the oscillated parts of the cross guide 364 (i.e., massesof the oscillated parts) for the first orientation cross guide 364P andfor the second orientation cross guide 364S are opposite.

As shown in Table 1, if the XY slider is configured only with the crossguide 364 of one of the attaching orientations (e.g., the firstorientation cross guide 364P), the masses of the oscillated parts of thecross guide 364 change depending on whether the vibrating table 400 isoscillated in the X-axis direction or in the Y-axis direction. Due tothis configuration, directionality occurs in the oscillating performanceof the oscillating device 1. However, by providing the same number (aplurality of pairs) of the first orientation cross guides 364P and thesecond orientation cross guides 364S, the sum of the masses of theoscillated parts of the cross guide 364 becomes constant regardless ofwhether the vibrating table 400 is oscillated in the X-axis direction orthe Y-axis direction, and therefore the directionality in theoscillating performance can be reduced.

Therefore, the XY slider 360A of the present variation which isconfigured with four pairs of the first orientation cross guide 364P andthe second orientation cross guide 364S has less directionality ascompared to the XY slider 360 of the first embodiment in which thenumber of the second orientation cross guide 364S is greater than thenumber of the first orientation cross guide 364P by one, and therebyenables uniform oscillation.

Also, since the total number of the cross guides 364 included in the XYslider 360A is fewer than that in the XY slider 360 of the firstembodiment, the oscillated portion is reduced in weight, thereby makingit possible to oscillate with higher frequencies.

Also, since the directionalities in the behaviors and the biases in themass distributions of the crossguides 364P, 364S are effectivelycanceled by arranging the crossguides 364P, 364S in two attachingorientations alternately (uniformly) in each direction, it becomespossible to oscillate every portion of the vibrating table 400 moreuniformly.

Next, the vibration table 400 will be described.

As shown in FIGS. 1-3, substantially the entire surface of the side faceof the vibrating table 400 on the X-axis negative direction side (rightside face in FIG. 1) is substantially evenly supported by the slidecoupling mechanism 160 (specifically, a plurality of the linearguideways in which the slide coupling mechanism 160 includes) and themovable part 120 of the X-axis oscillating unit 100. By thisconfiguration, it is configured such that the entire side face of thevibrating table 400 on the X-axis negative direction side can receivesubstantially even oscillating force from the X-axis oscillating unit100.

Similarly, substantially the entire surface of the side face of thevibrating table 400 on the Y-axis negative direction side (left sideface in FIG. 2) is substantially evenly supported by the slide couplingmechanism 260 and the movable part 220 of the Y-axis oscillating unit200. By this configuration, it is configured such that the entire sideface of the vibrating table 400 on the Y-axis negative direction sidecan receive substantially even oscillating force from the Y-axisoscillating unit 200.

Also, as shown in FIG. 5 and FIG. 6, substantially the entire surface ofthe lower face of the vibrating table 400 is substantially evenlysupported by the slide coupling mechanism 360 (specifically, a pluralityof the linear guideways which the slide coupling mechanism 360 include)and the movable part 320 of the Z-axis oscillating unit 300. By thisconfiguration, it is configured such that the entire lower face of thevibrating table 400 can receive substantially even oscillating forcefrom the Z-axis oscillating unit 300.

Therefore, if the center of gravity of the entire oscillated portion(the oscillated object and portions of the oscillating device 1, such asthe vibrating table 400, which are oscillated along with the oscillatedobject) is inside the vibrating table 400, the entire oscillated portioncan be oscillated without applying moments of forces of high magnitudesto the entire oscillated portion. Due to this configuration, occurrenceof unnecessary vibration components (vibration noises) caused by momentsof forces applied to the entire oscillated portion are reduced, therebymaking it possible to oscillate with higher accuracy.

FIG. 36, FIG. 37 and FIG. 38 are a plan view, a front view and a leftside view, respectively, of the vibrating table 400 according to anembodiment of the present disclosure in a state where an oscillatedobject T1 is attached. The vibrating table 400 of the present embodimentis configured such that an oscillation of an oscillated object can beperformed in a state where the oscillated object is accommodated insidethe vibrating table 400.

As showing in FIG. 37 and FIG. 38, the vibrating table 400 includes abox part 400 a having an opening on its top face, and a lid part 400 bwhich closes the opening of the box part 400 a. It is noted that FIG. 36shows a state where the lid part 400 b is removed. The lid part 400 b isdetachably attached to the box part 400 a by bolts (not shown) which fitfemale screws 421 provided on a top face of the box part 400 a (morespecifically, a frame part 420 which will be described later). Thevibrating table 400 is configured such that its center of gravity ispositioned substantially at the center of its outer shape.

The box part 400 a has a bottom plate 450, and a frame part (wall part)420 which vertically protrudes upward from a peripheral edge of thebottom plate 450. As shown in FIG. 36, the bottom plate 450 is formed ina shape in which four corners of a square are cut off.

Inside the frame part 420, a plurality of intermediate plates 430, 440parallel to respective wall surfaces of the frame part 420 (apart fromthe cut off portions) are provided in a lattice. The intermediate plates430 extend in the Y-axis direction (right-left direction in FIG. 36),and the intermediate plates 440 extend in the X-axis direction (up-downdirection in FIG. 36). The intermediate plates 430, 440 are joint to thebottom plate 450 and the frame part 420 at one end (or both ends)thereof.

At the central portion of the vibrating table 400, an accommodatingspace S, which is a hollow part in which no intermediate plate (wallpart) 430, 440 is formed, is provided. An oscillated object isaccommodated in this accommodating space S.

At the central portions in the extending directions (horizontaldirections) of the intermediate plates 430 a, 440 a which separate theaccommodating space S, thick plate parts 431, 441, which are thickerthan the other portions, are respectively formed. To the thick plateparts 431, 441, through holes 432, 442, in which bolts B for fixing theoscillated object are inserted, are respectively formed. In FIGS. 36-38,attachment parts 460 for attaching the oscillated object T1 to thevibrating table 400 are fixed to the intermediate plates 440 a on bothsides in the right-left direction by the bolts B inserted in the throughholes 432.

Also, the oscillated object T1 is placed substantially at the center ofthe accommodating space S. Therefore, the center of gravity of theoscillated object T1 is positioned near the center of the vibratingtable 400.

The vibrating table 400 of the present embodiment is configured to beable to oscillate an oscillated object having a rotating shaft (e.g.,power transmission devices such as engines, motors and differentialgears) in a state where the rotating shaft is rotated. The oscillatedobject T1 (and an oscillated object T2 which will be described later) ofthe present embodiment is a generator for hybrid cars.

As shown in FIG. 37 and FIG. 38, on the left side face of the frame part420, an opening 422 for inserting a drive belt DB for transmitting poweris formed. Also, on the intermediate plate 440 at the left side, anopening 443 for inserting the drive belt DB is formed at a positionopposing the opening 422. In the present embodiment, the drive belt DBis wound around a drive pulley (not shown) of an external driving deviceand a driven pulley FP attached to the oscillated object T1, and thus itis made possible to oscillate the oscillated object T1 while rotatingthe oscillated object T1 by applying a driving force to the oscillatedobject T1 inside the vibrating table 400 from outside duringoscillation.

It is noted that, in place of the drive belt DB (or in addition to thedrive belt DB), one or more long objects of other types for connectingthe oscillated object T1 with one or more external devices, such aspipes for supplying hydraulic pressure or air pressure to the oscillatedobject T1, electrical power cables for supplying electrical power, andcommunication cables for communicably connecting an external informationprocessing device and the oscillated object (or sensors or measuringdevices attached to the oscillated object), can be inserted in theopenings 422, 443. Also, one or more openings for inserting these pipesand/or cables may be provided to the vibrating table 400 in addition tothe openings 422, 443.

Also, if, for example, the oscillated object is an engine, theoscillated object and an external measuring device can be coupled by thedrive belt DB, and power that the oscillated object generates can bemeasured while oscillating the oscillated object.

Also, to the bottom plate 450 of the vibrating table 400, a plurality offemale screws 451 for fixing the oscillated object are provided.

FIG. 39 is a left side view of the vibrating table 400 in a state wherean oscillated object T2, having through holes for fixing at the bottomportion, is attached. The oscillated object T2 is fixed to the bottomplate 450 of the vibrating table 400 by screwing bolts B, inserted inthe through holes for fixing of the oscillated object T2, in the femalescrews 451.

The oscillated object 12 is attached substantially at the center of theaccommodating space S, too. Therefore, the center of gravity of theoscillated object 12 is positioned near the center of the vibratingtable 400. It is noted that, although, in FIG. 39, the oscillated object12 is directly fixed to the bottom plate 450 of the vibrating table 400,if the center of gravity of the oscillated object T2 is low, theoscillated object T2 may be fixed to the bottom plate 450 via a spaceror the like so as to position the center of gravity of the oscillatedobject T2 at the center of the vibrating table 400. Also, if the centerof gravity of the oscillated object T2 is high, the oscillated object T2may be, for example, fixed to the lid part 400 b and attached to thevibrating table 400 upside down.

As described above, in the present embodiment, an oscillated object andthe vibrating table 400 are oscillated in a state where the oscillatedobject is accommodated inside the vibrating table 400. Since the centerof gravity of the entire oscillated portion is surely positioned withinthe vibrating table 400 by accommodating the oscillated object insidethe vibrating table 400, it becomes possible to surely reduce theoccurrence of moments of forces on the entire oscillated portion.

It is noted that, although the vibrating table 400 of theabove-described embodiment is configured to have a box shape with a lid,the vibrating table 400 only needs to be configured such that, when anoscillated object is attached, the center of gravity of the entireoscillated portion is positioned within the vibrating table 400 (moreprecisely, within an area where a space formed by extending the movablepart 320 (slide coupling mechanism 360) of the Z-axis oscillating unit300 in the Z-axis direction and a space formed by extending the movablepart 120 (slide coupling mechanism 160) of the X-axis oscillating unit100 in the X-axis direction intersect). In other words, the vibratingtable 400 only needs to be configured such that a projection of thecenter of gravity of the entire oscillated portion to the XY planeperpendicular to the Z-axis is included in a projection of the movablepart 320 (slide coupling mechanism 360) of the Z-axis oscillating unit300 to the XY plane, and a projection of the center of gravity of theentire oscillated portion to the YZ plane perpendicular to the X-axis isincluded in a projection of the movable part 120 (slide couplingmechanism 160) of the X-axis oscillating unit 100 to the YZ plane. Forexample, the vibrating table 400 may have a configuration that only hasa face of the frame part 420 to which the slide coupling mechanism 160is attached and a bottom plate 450 to which the Z-axis oscillating unit300 is attached.

Also, in the present embodiment, it is made possible to more surelyapproach the center of gravity the oscillated object toward the centerof the vibrating table 400 by providing the accommodating space S (theintermediate plates 430 a. 440 a which separate the accommodating spaceS) at the center of the vibrating table 400.

Second Embodiment

Next, the second embodiment of the present disclosure will be described.The second embodiment differs from the first embodiment only in theconfigurations of the biaxial sliders (slide coupling mechanisms). Inthe following description of the second embodiment, differences from thefirst embodiment will mainly be described, and descriptions ofconfigurations that are common to those of the first embodiment areherein omitted.

FIG. 40 is an enlarged perspective view (partially transparent view)around a vibrating table 2400 of an oscillating device 2000 according tothe second embodiment of the present disclosure. The oscillating device2000 includes horizontal actuators 2100A and 2200A, and a verticalactuator 2300A. It is noted that, in FIG. 40, only an outline of thevibrating table 2400 is shown by two-dot lines. Also, illustrations ofthe counter balancers are omitted.

Similarly to the XY slider 360 of the first embodiment, each of biaxialsliders (YZ slider 2160, ZX slider 2260, XY slider 2360) of the presentembodiment is configured with nine cross guides 2164, 2264, 2364arranged at regular intervals in a lattice (three rows×three columns).The cross guides 2164, 2264, 2364 have the same configuration as thecross guide 364 of the XY slider 360 of the first embodiment.

The XY slider 2360 of the present embodiment has the same configurationas the XY slider 360 (FIG. 12) of the first embodiment. That is, twoarbitrary cross guides 2364 adjacent to each other in the X-axisdirection or in the Y-axis direction are arranged mutually reversely inthe up-down direction (in the Z-axis direction). That is, an X-axis rail2364 a/X (Y-axis rail 2364 a/Y) of one of the two arbitrary cross guides2364 adjacent to each other in the X-axis direction or in the Y-axisdirection is fixed to a tip face (top plate 2324 b) of a movable part2320, and the X-axis rail 2364 a/X (Y-axis rail 2364 a/Y) of the otherone is fixed to a lower face of the vibrating table 2400. By thisarrangement, directionalities in mass distribution and/or motioncharacteristic that each of the cross guides 2364 has are averaged, andthereby the oscillating performance with small directionality (orunevenness in directionalities) is obtained.

Also, since substantially the entire surface of the lower face of thevibrating table 2400 is uniformly oscillated via the nine cross guides2364 evenly and closely arranged, uniform oscillation with lessunevenness in vibrating states inside the vibrating table 2400 becomespossible.

In the present embodiment, the same arrangement configuration of thecross guides 364 (first orientation cross guides 364P, secondorientation cross guides 364S) as the first embodiment is adopted to thearrangement of the cross guides 2164 for the YZ slider 2160 and thearrangement of the cross guides 2264 for the ZX slider 2260.

Specifically, regarding the YZ slider 2160, a Y-axis rail 2164 a/Y(Z-axis rail 2164 a/Z) of one of two arbitrary cross guides 2164adjacent to each other in the Y-axis direction or in the Z-axisdirection is fixed to a tip face (top plate 2124 b) of a movable part2120, and the Y-axis rail 2164 a/Y (Z-axis rail 2164 a/Z) of the otherone is fixed to a side face of the vibrating table 2400.

Also, regarding the ZX slider 2260, an X-axis rail 2264 a/X (Z-axis rail2264 a/Z) of one of two arbitrary cross guides 2264 adjacent to eachother in the Z-axis direction or in the X-axis direction is fixed to atip face (top plate 2224 b) of a movable part 2220, and the X-axis rail2264 a/X (Z-axis rail 2264 a/Z) of the other one is fixed to a side faceof the vibrating table 2400.

As described above, each face of the vibrating table 2400 is uniformlyoscillated in three orthogonal directions by the same configuration asthe above-described XY slider 2360. Therefore, uniform oscillation withless unevenness in vibrating states throughout the entire vibratingtable 2400 becomes possible. Furthermore, since the vibrating table 2400is oscillated in three orthogonal directions via the biaxial sliders (YZslider 2160, ZX slider 2260, XY slider 2360) that have the sameconfiguration, oscillation with lesser directionalities becomespossible.

It is noted that, if a height of the vibrating table 2400 is short, theYZ slider 2160 and the ZX slider 2260 may be configured with six crossguides 2164, 2264 arranged in two rows×three columns, obtained byremoving three cross guides on the upper row or the lower row, among thenine cross guides 2164, 2264 arranged in three rows×three columns in thesecond embodiment. In this case, since, similarly to the variation 360A(FIG. 34), the same number of the first orientation cross guides and thesecond orientation cross guides are alternately arranged in twoorthogonal directions, directionalities in the oscillating performanceare reduced and it becomes possible to further uniformly oscillate eachpart of the vibrating table 2400.

Third Embodiment

FIG. 41 is an enlarged perspective view (partially transparent view)around a vibrating table 3400 of an oscillating device 3000 according tothe third embodiment of the present disclosure. It is noted that, inFIG. 41, only an outline of the vibrating table 3400 is shown by two-dotlines. Also, illustrations of the counter balancers are omitted.

The present embodiment is an embodiment in which the arrangementconfiguration of the cross guides 364 (first orientation cross guides364P, second orientation cross guides 364S) of the above-describedvariation 360A (FIG. 34) of the XY slider is applied to each biaxialslider (YZ slider 3160, ZX slider 3260, XY slider 3360). It is notedthat a horizontal actuator 3100A (including a movable part 3120 and atop plate 3124 b), a horizontal actuator 3200A (including a movable part3220 and a top plate 3224 b), a vertical actuator 3300A (including amovable part 3320 and a top plate 3324 b), a cross guide 3164 (includinga Y-axis rail 3164 a/Y and a Z-axis rail 3164 a/Z), a cross guide 3264(including an X-axis rail 3264 a/X and a Z-axis rail 3264 a/Z) and across guide 3364 (including an X-axis rail 3364 a/X and a Y-axis rail3364 a/Y) have the same configurations as the horizontal actuator 2100A,the horizontal actuator 2200A, the vertical actuator 2300A, a crossguide 2164, a cross guide 2264 and a cross guide 2364, respectively.

Since the YZ slider 3160 and the ZX slider 3260 of the presentembodiment couple the vibrating table 3400 to respective horizontalactuators 3100A and 3200A by a larger number of the cross guides 3164and the cross guides 3264 than the YZ slider 160 and the ZX slider 260of the first embodiment, it is possible to further uniformly oscillatethe vibrating table 3400. Furthermore, since, similarly to the variation360A (FIG. 34), the YZ slider 3160 and the ZX slider 3260 of the presentembodiment have configurations in which the same number of the firstorientation cross guides and the second orientation cross guides arealternately arranged, directionalities in the oscillating performanceare reduced and it becomes possible to further uniformly oscillate eachpart of the vibrating table 3400.

Fourth Embodiment

Next, the fourth embodiment of the present disclosure will be described.The fourth embodiment differs from the above-described first embodimentonly in the configurations of the biaxial sliders (slide couplingmechanisms). In the following description of the fourth embodiment,differences from the first embodiment will mainly be described, anddescriptions of configurations that are common to those of the firstembodiment are herein omitted.

FIG. 42, FIG. 43 and FIG. 44 are an enlarged front view, an enlargedside view and an enlarged plan view around a vibrating table 4400 of anoscillating device 4000 according to the fourth embodiment of thepresent disclosure, respectively.

The present embodiment differs from the configuration of the firstembodiment in that, in cross guide parts 4164, 4264, 4364 of biaxialsliders (YZ slider 4160, ZX slider 4260, XY slider 4360), couplingplates 4164 c, 4264 c, 4364 c are used to couple the linear guides toimprove rigidities of the cross carriage parts.

As shown in FIGS. 43-44, the YZ slider 4160 of the present embodimentincludes three Y-axis linear guides 4164/Y (Y-axis rails 4164 a/Y andY-axis carriages 4164 b/Y), five Z-axis linear guides 4164/Z (Z-axisrails 4164 a/Z and Z-axis carriages 4164 b/Z), and a coupling plate 4164c that couples all the Y-axis linear guides 4164/Y and the Z-axis linearguides 4164/Z. Similarly to the A-type carriage 364 b/A of the firstembodiment, the Y-axis carriage 4164 b/Y and the Z-axis carriage 4164b/Z are eight-streak type carriages, but unlike the A-type carriage 364b/A, lowering of aspect ratios (shortening) and weight reductions byforming the notches C1, C2 are not made. It is noted that the A-typecarriage 364 b/A may be used as the Y-axis carriage 4164 b/Y and theZ-axis carriage 4164 b/Z. Also, the same carriage as the Y-axis carriage4164 b/Y (Z-axis carriage 4164 b/Z) may be used in place of the A-typecarriage 364 b/A of other embodiments.

As shown in FIG. 44, the Y-axis linear guide 4164/Y is configured withone Y-axis rail 4164 a/Y and two Y-axis carriages 4164 b/Y.

As shown in FIG. 43, the Y-axis carriages 4164 b/Y of three Y-axislinear guides 41641/Y are arranged in the Z-axis direction withsubstantially no gap therebetween, and are fixed to a tip face of acoupling arm 4162. Also, the Y-axis rails 4164 a/Y are fixed to one faceof the coupling plate 4164 c. It is noted that the three Y-axis linearguides 4164/Y may be arranged in the Z-axis direction with intervalstherebetween. In this case, to give sufficient rigidity to the YZ slider4160, it is preferable that the intervals between the Y-axis linearguides 4164/Y are made narrower than a width (a size in the Z-axisdirection) of the Y-axis carriage 4164 b/Y.

The oscillating performance is improved by attaching the Y-axis carriage4164 b/Y, having large mass, not to the coupling plate 4164 c which isoscillated in two axial directions (X-axis direction, Y-axis direction)but to the coupling arm 4162 which is oscillated only in the X-axisdirection.

Also, since the Y-axis rail 4164 a/Y has uniform mass distribution inthe Y-axis direction, occurrence of vibration due to weight distributionchanges when oscillated in the Y-axis direction is low. Therefore,occurrence of vibration noises is reduced by attaching the Y-axis rails4164 a/Y to the coupling plate 4164 c which is oscillated in the Y-axisdirection.

On the other hand, the Z-axis linear guide 4164/Z is configured with oneZ-axis rail 4164 a/Z and one Z-axis carriage 4164 b/Z.

As shown in FIG. 44, the Z-axis carriages 4164 b/Z of five Z-axis linearguides 4164/Z are arranged in the Y-axis direction with substantially nogap therebetween, and are fixed to the other face of the coupling plate4164 c. Also, the Z-axis rails 4164 a/Z are fixed to a side face of thevibrating table 4400. It is noted that the five Z-axis linear guides4164/Z may be arranged in the Y-axis direction with intervalstherebetween. In this case, to give sufficient rigidity to the YZ slider4160, it is preferable that the intervals between the Z-axis linearguides 4164/Z are made narrower than a width (a size in the Y-axisdirection) of the Z-axis carriage 4164 b/Z.

In the present embodiment, the three Y-axis linear guides 4164/Y arearranged in the Z-axis direction with no gap therebetween. Similarly,the five Z-axis linear guides 4164/Z are arranged in the Y-axisdirection with no gap therebetween. Furthermore, all the Y-axis rails4164 a/Y and the Z-axis carriages 4164 b/Z are directly fixed to thecoupling plate 4164 c which has sufficiently high rigidity. By thisconfiguration, a rigidity of the YZ slider 4160 (especially a rigidityof the coupling part in which the coupling plate 4164 c, the Y-axisrails 4164 a/Y and the Z-axis carriages 4164 b/Z are integrally fixed)improves, and thereby makes the resonance frequency higher.

The oscillating performance is improved by attaching the Z-axis carriage4164 b/Z, having large mass, not to the vibrating table 4400 which isoscillated in three axial directions (X-axis direction, Y-axisdirection, Z-axis direction) but to the coupling plate 4164 c which isoscillated only in two axial directions (X-axis direction, Y-axisdirection).

Also, occurrence of vibration noises is reduced by attaching the Z-axisrails 4164 a/Z to the vibrating table 4400 which is oscillated in theZ-axis direction.

Also, on one face of the coupling plate 4164 c, a plurality of theY-axis rails 4164 a/Y are spread substantially all over the surface, andthe coupling plate 4164 c is oscillated in the X-axis direction via aplurality of the Y-axis rails 4164 a/Y that evenly cover one face of thecoupling plate 4164 c. Therefore, the entire coupling plate 4164 c isuniformly oscillated in the X-axis direction. Furthermore, oscillatingforces transmitted from the Y-axis linear guides 4164/Y are averaged bythe coupling plate 4164 c having a high rigidity, and are transmitted tothe vibrating table 4400 via the Z-axis linear guides 4164/Z as a moreuniform oscillating force.

Similarly, on a side face of the vibrating table 4400 opposing themovable part 120 of the X-axis oscillating unit, a plurality of theZ-axis rails 4164 a/Z are spread substantially all over the surface, andthe vibrating table 4400 is oscillated in the X-axis direction via aplurality of the Z-axis rails 4164 a/Z that evenly cover this side face.Therefore, the entire vibrating table 4400 is uniformly oscillated inthe X-axis direction, and uniform oscillation with less unevenness inaccelerations and jerk inside the vibrating table 4400 becomes possible.

Since the ZX slider 4260 has the same configuration as theabove-described YZ slider 4160, detailed descriptions of a coupling arm4262, X-axis linear guides 4264/X (X-axis rails 4264 a/X and X-axiscarriages 4264 b/X) and Z-axis linear guides 4264/L (Z-axis rails 4264a/Z and Z-axis carriages 4264 b/Z) of the ZX slider 4260 are hereinomitted.

As shown in FIGS. 42-43, the XY slider 4360 of the present embodimentincludes three X-axis linear guides 4364/X (X-axis rails 4364 a/X andX-axis carriages 4364 b/X), three Y-axis linear guides 4364/Y (Y-axisrails 4364 a/Y and Y-axis carriages 4364 b/Y), and a coupling plate 4364c that couples all the X-axis linear guides 4364/X and the Y-axis linearguides 4364/Y. The X-axis carriage 4364 b/X and the Y-axis carriage 4364b/Y have the same configurations as the Y-axis carriage 4164 b/Y and theZ-axis carriage 4164 b/Z.

As shown in FIG. 43, the X-axis linear guide 4364/X is configured withone X-axis rail 4364 a/X and two X-axis carriages 4364 b/X.

Also, as shown in FIG. 42, the X-axis rails 4364 a/X of the three X-axislinear guides 4364/X are arranged in the Y-axis direction at regularintervals, and are fixed to a tip face of the movable part 320 of theZ-axis oscillating unit 300. The X-axis carriages 4364 b/X are fixed toa lower face of the coupling plate 4364 c.

The Y-axis linear guide 4364/Y is also configured with one Y-axis rail4364 a/Y and two Y-axis carriages 4364 b/Y.

Also, as shown in FIG. 43, the Y-axis rails 4364 a/Y of the three Y-axislinear guides 4364/Y are arranged in the X-axis direction at regularintervals, and are fixed to a top face of the coupling plate 4364 c. TheY-axis carriages 4364 a/Y are fixed to a lower face of the vibratingtable 4400.

In the present embodiment, the three X-axis linear guides 4364/X arearranged at intervals narrower than a width (a size in the Y-axisdirection) of the X-axis carriage 4364 b/X. Similarly, the three Y-axislinear guides 4364/Y are arranged at intervals narrower than a width (asize in the X-axis direction) of the Y-axis carriage 4364 b/Y.Furthermore, all the X-axis carriages 4364 b/X and the Y-axis rails 4364a/Y are directly fixed to the coupling plate 4364 c which hassufficiently high rigidity. By this configuration, a rigidity of the XYslider 4360 (especially a rigidity of the coupling part in which thecoupling plate 4364 c, the X-axis carriages 4364 b/X and the Y-axisrails 4364 a/Y are integrally fixed) improves, and thereby makes theresonance frequency higher.

It is noted that, although, in the present embodiment, the X-axis linearguides 4364/X and the Y-axis linear guides 4364/Y of the XY slider 4360are arranged with intervals therebetween, similarly to the Y-axis linearguides 4164/Y and the Z-axis linear guides 4164/Z of the YZ slider 4160,the X-axis linear guides 4364/X and the Y-axis linear guides 4364/Y maybe arranged with substantially no gap therebetween.

Furthermore, although the coupling plates 4164 c, 4264 c, 4364 c of thepresent embodiment are formed of stainless steel, if the oscillatingperformance of higher frequency is required, lighter structure materialssuch as aluminium alloys such as duralumin, magnesium alloys, carbonfiber composite materials or the like may be used to reduce inertia ofthe biaxial sliders.

Fifth Embodiment

Next, the fifth embodiment of the present disclosure will be described.FIG. 45 is an external view of an oscillating device 5000 according tothe fifth embodiment of the present disclosure. The fifth embodimentdiffers from the first embodiment in the configurations of the linearguides which are used in the biaxial sliders (slide couplingmechanisms), the movable part support mechanisms and the fixing partsupport mechanisms, and in the configurations of the biaxial sliders. Inthe following description of the fifth embodiment, differences from thefirst embodiment will mainly be described, and descriptions ofconfigurations that are common to those of the first embodiment areherein omitted.

Firstly, configurations of ZX slider 5260 which couples a Y-axisoscillating unit 5200 and a vibrating table 5400 will be described.

FIG. 46 is a diagram showing a distal end of the Y-axis oscillating unit5200 to which the ZX slider 5260 is attached. The ZX slider 5260includes two Z-axis rails 5264 a/Z, four Z-axis carriages 5264 b/Z, fourX-axis carriages 5264 b/X, two X-axis rails 5264 a/X and a coupling arm5262. The coupling arm 5262 is a supporting member which is fixed to atop plate 5224 b of an extension frame 5224.

The two Z-axis rails 5264 a/Z extending in the Z-axis direction arearranged in the X-axis direction with a predetermined intervaltherebetween, and are fixed to the coupling arm 5262. To each Z-axisrail 5264 a/Z, two Z-axis carriages 5264 b/Z which slidably engage withthe Z-axis rail 5264 a/Z are mounted.

Also, the two X-axis rails 5264 a/X extending in the X-axis directionare arranged in the Z-axis direction with a predetermined intervaltherebetween, and are attached to a side face of the vibrating table5400 (FIG. 45) opposing the Y-axis oscillating unit 5200. To each X-axisrail 5264 a/X, two X-axis carriages 5264 b/X which slidably engage withthe X-axis rail 5264 a/X are mounted.

Each Z-axis carriage 5264 b/Z is integrally fixed to one of the X-axiscarriages 5264 b/X by bolts in a state where top faces of theircarriages are superimposed with each other, thereby forming a crosscarriage 5264.

A pair of the Z-axis rails 5264 a/Z and a pair of the X-axis rails 5264a/X are arranged in a curb shape, and are coupled by the cross carriages5264 at positions where they intersect each other. As a result, amovable part 5220 of the Y-axis oscillating unit 5200 (the movable part5220 being movably supported only in its driving direction by a movablepart support mechanism 5240) and the vibrating table 5400 are coupledslidably in both the X-axis direction and the Z-axis direction.

As described above, the ZX slider 5260 of the present embodimentincludes a pair of the Z-axis rails 5264 a/Z and a pair of the X-axisrails 5264 a/X each arranged in their width directions (regarding theZ-axis rails 5264 a/Z, in the X-axis direction, and regarding the X-axisrails 5264 a/X, in the Z-axis direction) with intervals therebetween. Bythis configuration, rigidities of the ZX slider 5260 against moments offorces about longitudinal axes of respective rails improve, therebymaking it possible to oscillate with higher frequencies.

It is more advantageous to make the arrangement interval for each pairof the rails as wide as possible. In the present embodiment, theinterval for the X-axis rails 5264 a/X is limited by a height of thevibrating table 5400. Therefore, one X-axis rail 5264 a/X is attached atan upper end part of the side face of the vibrating table 5400, and theother X-axis rail 5264 a/X is attached to a lower end part of the sideface of the vibrating table 5400. Also, the arrangement interval for theZ-axis rails 5264 a/Z is limited by a diameter of the movable part 5220(top plate 5224 b) of the Y-axis oscillating unit 5200. Therefore, asshown in FIG. 46, the interval for a pair of the Z-axis rail 5264 a/Z isa maximum interval within a range in which each Z-axis rail 5264 a/Zdoes not protrude outside a cylindrical surface formed by extending anouter peripheral surface of the movable part 5220 in the Y-axisdirection.

It is also noted that, since the X-axis rail 5264 a/X is longer than theX-axis carriage 5264 b/X, and the width (X-axis direction) of thevibrating table 5400 is greater than the width of the coupling arm 5262,it becomes possible to widen a sliding width of the ZX slider 5260 inthe X-axis direction. Also, since the width of the vibrating table 5400is greater than the height (Z-axis direction) of the vibrating table5400, it becomes possible to further widen the sliding width of the ZXslider 5260 in the X-axis direction by attaching the X-axis rail 5264a/X to the vibrating table.

Next, internal structures of a Z-axis linear guide 5264/Z configuredwith the Z-axis rails 5264 a/Z and the Z-axis carriages 5264 b/Z will bedescribed. It is noted that other linear guides which are used in theoscillating device 5000 have the same structures as the Z-axis linearguide 5264/Z.

FIG. 48 is a longitudinal section view of the Z-axis rail 5264 a/Z andthe Z-axis carriage 5264 b/Z of the ZX slider 5260 cut along a planeperpendicular to a longitudinal axis of the Z-axis rail 5264 a/Z (i.e.,XY plane). Also, FIG. 49 is a figure viewing from the arrow direction ofI-I line of FIG. 48. The Z-axis linear guide 5264/Z of the presentembodiment is a linear guide in which rollers are used as the rollingbodies. By using millers as the rolling bodies, high positionalaccuracies and rigidities can be obtained. It is noted that balls orlinear guides can be used as the rolling bodies.

On each of both side faces in the Y-axis direction of the Z-axis rail5264 a/Z shown in FIG. 48, a groove GR having a trapezoidal sectionalshape and extending in the Z-axis direction is formed. Also, as shown inFIG. 48 and FIG. 49, to the Z-axis carriage 5264 b/Z, the groove GRextending in the Z-axis direction is formed such that the groove GRsurrounds the Z-axis rail 5264 a/Z. To each side wall of the groove GR,a protruding part PR extending along the groove GR of the Z-axis rail5264 a/Z is formed. To the protruding part PR, a pair of inclined faces,the inclined faces of the pair being parallel to respective inclinedfaces of the trapezoidal groove GR of the Z-axis rail 5264 a/Z, isformed. Between the four inclined faces of a pair of the grooves OR andthe opposing inclined faces of the protruding part PR, respective gapsare formed. In each of these four gaps, a plurality of rollers RE′(RE′h, RE′i, RE′j, RE′k) made of stainless steel and a retainer RT′ madeof resin and configured to rotatably retain and couple the rollers areaccommodated. Each of the rollers RE′ is retained by being nippedbetween the inclined face of the groove OR and the inclined face of theprotruding part PR.

Also, inside the Z-axis carriage 5264 b/Z, four no-load paths (rollerescape passages) Q′ (Q′a, Q′b, Q′c, Q′d), being parallel to fourrespective gaps described above, are formed. As shown in FIG. 49, theno-load paths Q′a, Q′b, Q′c, Q′d communicate with respective gaps atboth ends thereof. Thereby, circulating passages for allowing therollers RE′ (RE′h, RE′i, RE′j, RE′k) and the retainer RT′ to circulateare formed.

As the Z-axis carriage 5264 b/Z moves with respect to the Z-axis rail5264 a/Z in the Z-axis direction, a plurality of rollers RE′h, RE′i,RE′j, RE′k circulate in respective circulating passages CP′a, CP′b,CP′c, CP′d along with the retainer RT′. Therefore, even if large loadsare applied in directions different from the Z-axis direction, thecarriage can be supported by a plurality of rollers and a resistance inthe Z-axis direction is maintained low by the rolling of the rollers RE′(RE′h, RE′i, RE′j, RE′k), and thus the Z-axis carriage 5264 b/Z can bemoved smoothly with respect to the Z-axis rail 5264 a/Z.

As shown in FIG. 49, the retainer RT′ that couples a plurality ofrollers (e.g., rollers RE′k) has a plurality of spacer parts RT′spositioned between the rollers RE′k and a pair of bands RT′b thatcouples a plurality of the spacer parts RT′s. Both ends of each spacerpart RT′s are fixed to respective bands RT′b of the pair to form theladder-like retainer RT′. Each roller RE′k is retained in a spacesurrounded by a pair of adjacent spacer parts RT′s and the pair of bandsRT′b.

Also, by interposing the spacer parts RT′s of the retainer RT′ havinglow hardness between the rollers RE′k, oil film shortage and/or abrasiondue to direct contacts between the rollers RE′k with very narrow contactsurface area are prevented, friction resistance decreases, and theproduct life drastically extends.

By coupling the Y-axis oscillating unit 5200 and the vibrating table5400 via the ZX slider 5260 capable of sliding in the X-axis directionand the Z-axis direction with very small friction resistance asdescribed above, vibration components of the vibrating table 5400 in theX-axis direction and the Z-axis direction will not be transmitted to theY-axis oscillating unit 5200 even if the vibrating table 5400 isvibrated in the X-axis direction and the Z-axis direction by the X-axisoscillating unit 5100 and a Z-axis oscillating unit 5300, respectively.Also, since the vibrating table 5400 hardly receives forces in theZ-axis direction and the X-axis direction by the driving of the Y-axisoscillating unit 5200, oscillation with less crosstalk becomes possible.

Furthermore, the YZ slider 5160 which couples the X-axis oscillatingunit 5100 and the vibrating table 5400 also has the same configurationas the ZX slider 5260, and the vibrating table 5400 is coupled to themovable part of the X-axis oscillating unit 5100 slidably in the Y-axisdirection and the Z-axis direction. Therefore, vibration components ofthe vibrating table 5400 in the Y-axis direction and the Z-axisdirection will not be transmitted to the X-axis oscillating unit 5100even if the vibrating table 5400 is vibrated in the Y-axis direction andthe Z-axis direction by the Y-axis oscillating unit 5200 and the Z-axisoscillating unit 5300, respectively. Also, since the vibrating table5400 hardly receives forces in the Y-axis direction and the Z-axisdirection by the driving of the X-axis oscillating unit 5100,oscillation with less crosstalk becomes possible.

Next, a configuration of an XY slider 5360 that couples the Z-axisoscillating unit 5300 and the vibrating table 5400 will be described.

FIG. 47 is a side view around the XY slider 5360. FIG. 50 is a diagramillustrating arrangements of rails of the XY slider 5360 to be attachedto a top plate 5362 of a movable part 5320 of the Z-axis oscillatingunit 5300 (the movable part 5320 being movably supported only in itsdriving direction by a movable part support mechanism 5340).

The XY slider 5360 includes four cross guides 5364. The cross guide 5364(5364P, 5364S) includes one X-axis linear guide 5364/X (5364/XL,5364/XH) and one Y-axis linear guide 5364/Y (5364/YH, 5364/YL). TheX-axis linear guide 5364/X is configured with one X-axis rail S364 a/X(5364 a/XL, 5364 a/XH) and one X-axis carriage 5364 b/X (5364 b/XL, 5364b/XH), and the Y-axis linear guide 5364/Y is configured with one Y-axisrail 5364 a/Y (5364 a/YH, 5364 a/YL) and one Y-axis carriage 5364 b/Y(5364 b/YH, 5364 b/YL).

The X-axis carriage 5364 b/X and the Y-axis carriage 5364 b/Y areintegrally fixed by bolts in a state where top faces of the carriagesare superimposed with each other, thereby forming a cross carriage. Thiscross carriage has the same configuration as the cross carriage 5264 ofthe ZX slider 5260 described above.

The cross guide 5364 includes the first orientation cross guide 5364P ofwhich the X-axis linear guide 5364/X is attached to the vibrating table5400, and the second orientation cross guide 5364S of which the Y-axislinear guide 5364/Y is attached to the vibrating table 5400. The X-axisrail 5364 a/XL of the cross guide 5364P is attached to the top face ofthe top plate 5362, and the Y-axis rail 5364 a/YH is attached to a lowerface of the vibrating table 5400. Also, the Y-axis rail 5364 a/YL of thecross guide 5364S is attached to the top face of the top plate 5362, andthe X-axis rail 5364 a/XH is attached to the lower face of the vibratingtable 5400. That is, each cross guide 5364 couples the movable part 5320of the Z-axis oscillating unit 5300 and the vibrating table 5400slidably in the X-axis direction and in the Y-axis direction.

It is noted that the X-axis linear guide 5364/X and the Y-axis linearguide 5364/Y attached to the top plate 5362 will be referred to as alower X-axis linear guide 5364/XL (lower X-axis rail 5364 a/XL, lowerX-axis carriage 5364 b/XL) and a lower Y-axis linear guide 5364/YL(lower Y-axis rail 5364 a/YL, lower Y-axis carriage 5364 b/YL),respectively. Also, the X-axis linear guide 5364/X and the Y-axis linearguide 5364/Y attached to the vibrating table 5400 will be referred to asan upper X-axis linear guide 5364/XH (upper X-axis rail 5364 a/XH, upperX-axis carriage 5364 b/XH) and an upper Y-axis linear guide 5364/YH(upper Y-axis rail 5364 a/YH, upper Y-axis carriage 5364 b/YH),respectively.

As shown in FIG. 50, the four cross guides 5364 are attached at fourcorners of the top face of the substantially square shaped top plate5362. Also, the cross guides 5364P and 5364S are alternately arrangedaround a central axis Ax of the Z-axis oscillating unit 5300. That is,the arrangement of the cross guides 5364P and 5364S have four timesrotation symmetry about the central axis Ax. By this arrangement of thecross guides 5364, the mass distribution of the XY slider 5360 about thecentral axis Ax is levelized. As a result, response characteristics ofthe XY slider 5360 to vibrations in the X-axis direction and the Y-axisdirection are made more homogenous.

Also, the X-axis carriage 5364 b/X and the Y-axis carriage 5364 b/Y havethe same structures apart from the types of the attachment holes (Fourthrough holes are formed on the X-axis carriage 5364 b/X, and four screwholes are formed on the Y-axis carriage 5364 b/Y). Furthermore, theX-axis rail 5364 a/X and the Y-axis rail 5364 a/Y are the same. Eachlinear guide (X-axis linear guide 5364/X. Y-axis linear guide 5364/Y)has different mass distributions in the X-axis direction and in theY-axis direction. However, the mass distributions in the X-axisdirection and in the Y-axis direction are levelized by coupling the twolinear guides to form the cross guide 5364. The response characteristicsof the XY slider 5360 to vibrations in the X-axis direction and theY-axis direction are made more homogenous by this configuration as well.

Also, each oscillating unit (X-axis oscillating unit 5100, Y-axisoscillating unit 5200, Z-axis oscillating unit 5300) is attached to adevice base 5500 via a pair of supporting units 5150, 5250, 5350 (fixingpart support mechanism). The supporting unit 5150, 5250, 5350 is acushioning device including elastic components (coil springs or airsprings) that elastically support each oscillating unit 5100, 5200,5300, and suppress transmission of vibration (especially the highfrequency components) of each oscillating unit in the oscillatingdirection to the device base 5500. By attaching each oscillating unit5100, 5200, 5300 to the device base 5500 via the supporting unit 5150,5250, 5350, transmission of vibrations between the oscillating units5100, 5200, 5300 are suppressed, and triaxial oscillation with lesscrosstalk and higher accuracy becomes possible.

Sixth Embodiment

Next, the sixth embodiment of the present disclosure will be described.The sixth embodiment differs from the first embodiment in the framestructures of the movable parts of respective electrodynamic actuators(horizontal actuators in the X-axis direction and the Y-axis direction,and a vertical actuator 6300A). In the following description of thesixth embodiment, differences from the first embodiment will mainly bedescribed, and descriptions of configurations that are common to thoseof the first embodiment are herein omitted.

FIG. 51 is a front view of an electrodynamic triaxial oscillating device6000 (only a Z-axis oscillating unit 6300, the vibrating table 400, theX-axis counter balancer 610, the Y-axis counter balancer 620 and theZ-axis counter balancer 630 are shown) according to the sixth embodimentof the present disclosure. The movable part 6320 of the verticalactuator 6300A of the sixth embodiment includes a frame 6322.

FIG. 52 and FIG. 53 are perspective views showing an outer appearance ofthe frame 6322. FIG. 52 is a diagram showing the frame 6322 viewed fromthe front side (vibrating table 400 side), and FIG. 53 a diagram showingthe frame 6322 viewed from the back side. The frame 6322 as a whole isformed to have a substantially cylindrical shape of which the centralaxis extends in the driving direction (Z-axis direction).

The frame 6322 of the present embodiment is formed by the casting andcutting of aluminium alloys, but materials and processing methods forthe frame 6322 are not limited to the above. For example, the frame 6322may be made of other metallic materials such as stainless steels,titanium alloys or magnesium alloys, or resin materials such as glassfiber reinforced plastics (GFRP) or carbon fiber reinforced plastics(CFRP). Also, the frame 6322 may be integrally formed by welding,adhesion, bonding, injection molding, three-dimensional modeling (3Dprinter) or the like.

The frame 6322 includes a substantially tubular main column 6322 aextending in the drive direction, eight plate-like ribs 6322 b (6322 b1, 6322 b 2) radially extending from an outer peripheral surface of themain column 6322 a, a substantially circular front side peripheral edgepart 6322 c which couples distal ends of the eight ribs 6322 b at thefront side, a substantially circular back side peripheral edge part 6322d which couples distal ends of the eight ribs 6322 b at the back side,and a tubular intermediate coupling part 6322 e which couplesintermediate portions in the radial direction (radiation direction) ofthe eight ribs 6322 b at the front side. It is noted that, in the maincolumn 6322 a, the rod 326 (see FIG. 8) fits from below.

By adopting the configuration in which the eight ribs 6322 b arecircularly coupled by the front side peripheral edge part 6322 c, theback side peripheral edge part 6322 d and the intermediate coupling part6322 e, it is made possible to satisfy both high rigidity and weightsaving of the frame 6322. Also, by providing the intermediate couplingpart 6322 e, it is made possible to more evenly support a base plate6362 (to support the base plate 6362 with a face).

On a front side of the frame 6322 (specifically, the ribs 6322 b, thefront side peripheral edge part 6322 c and the intermediate couplingpart 6322 e), a plurality of tapped holes 6322 ft for attaching the baseplate 6362 are formed. Also, on a back side of the frame 6322(specifically, the back side peripheral edge part 6322 d), a pluralityof screw holes 6322 rt for attaching the drive coil 321 are formed.

On each of end faces (outer peripheral surfaces) of four ribs 6322 b 1out of the eight ribs 6322 b, a row of screw holes 6322 bt for attachingthe Z-axis rails 344 a of the movable part support mechanism 340 isformed. Also, on end faces of the remaining four ribs 6322 b 2, fittinggrooves 6322 bg which fit with the coil attaching parts 322 d areformed. The ribs 6322 b 1 and the ribs 6322 b 2 are alternately arrangedin a circumferential direction.

On a front side of an outer periphery of the front side peripheral edgepart 6322 c, recessed parts 6322 ca are formed near the ribs 6322 b soas not to interfere with the Z-axis carriages 344 b of the movable partsupport mechanism 340. On the bottom of the recessed part 6322 ca, alevel difference 6322 cb for positioning the Z-axis rail 344 a in thehorizontal direction is formed along the row of the holes 6322 bt. Anend face of the rib 6322 b 1 on a front side on which the Z-axis rail344 a is to be attached is also offset toward the main column 6322 a upto the same depth as the bottom of the recessed part 6322 ca, therebyforming a rail attaching surface 6322 br. Also, on the end face of therib 6322 b 1, a level difference 6322 bs for positioning the Z-axis rail344 a in the vertical direction is formed at a boundary of the railattaching surface 6322 br.

The movable part 320 of the first embodiment described above includes asplit type (two-piece) frame in which an extension frame 324 is coupledto the main frame 322 with bolts. By adopting the split type framestructure, it is made possible to additionally equip a standardelectrodynamic actuator, having the main frame 322 only, with themovable part support mechanism 340.

However, since the split type frame structure requires a structure forcoupling the two parts (the main frame 322 and the extension frame 324),and furthermore, the structure of the entire frame cannot be optimized(i.e., there is no choice but to design for the existing main frame322), the split type frame structure causes the weight of the frame toincrease, and thereby causes weight imbalance. Therefore, the split typeframe structure is one of the causes that restrict the oscillatingperformance of the electrodynamic actuator. Furthermore, since the splittype frame requires a process for coupling the two parts, more man-houris necessary to assemble.

In the present embodiment, the integrated (one-piece) frame 6322 is usedin place of the main frame 322 and the expansion frame 324 of the firstembodiment. With this configuration, since there is no need to provide astructure for coupling a plurality of parts of the frame and theflexibility in design can be improved, the frame 6322 that is lighter,that has higher rigidity, that has better weight balance, and that canbe assembled with less man-hour can be realized.

It is noted that, in the first embodiment, the top plate 322 b(corresponding to the base plate 6362 of the present embodiment) forattaching the XY slider 360 is formed integrally with the expansionframe 324, but in the present embodiment, the frame 6322 and the baseplate 6362 are separate members. By this configuration, it becomesunnecessary to change the design of the frame 6322 in accordance withthe design of the XY slider 360, and thus designing and productionmanagement of the frame 6322 becomes easier. Furthermore, as with thefirst embodiment, the frame 6322 and the base plate 6362 may beintegrated.

It is noted that the frame 6322 of the present embodiment can also beapplied to the first to fifth embodiments.

The foregoings are descriptions of exemplary embodiments of the presentdisclosure. Embodiments of the present disclosure are not limited to theabove-described embodiments, and various modifications are possiblewithin a range of the technical ideas expressed by the descriptions inthe scope of claims. For example, configurations of embodiments and thelike explicitly illustrated in this specification and/or configurationsin which configurations of embodiments and the like that are obvious, toa person with ordinary skills in the art, from this specification arecombined accordingly are also included in the embodiments of thisapplication.

Each of the above described embodiments is an example in which thepresent disclosure is applied to an electrodynamic oscillating device,but the present disclosure is not limited to this configuration and canbe applied to oscillating devices which use other types of oscillatingunits (e.g., a linear motion oscillating unit in which a rotary electricmotor or a hydraulic rotary motor and a rotation/linear motionconversion mechanism such as a feed screw mechanism are combined, alinear motor and the like) as well. For example, the present disclosurecan be applied to a conventionally known oscillating unit in which aservo motor and a ball screw mechanism are used.

Also, each of the above described embodiments is an example in which thepresent disclosure is applied to an electrodynamic triaxial simultaneousoscillating device, but the present disclosure can of course be appliedto uniaxial and biaxial oscillating devices as well.

Also, in the first embodiment, an air spring is used as a cushioningmeans for attenuating vibration of the supporting unit 350 (fixing partsupport mechanism), but configurations that use other types of springsthat have vibration prevention effects (e.g., a coil spring made ofsteel) or elastic bodies (such as a vibration prevention rubber) arealso possible.

The number of linear guides (one, two, three, four, or five or more) foreach axis and their arrangements in the slide coupling mechanism may beselected accordingly in accordance with a size of a vibrating table, asize and weight distribution of a specimen, test conditions (frequencyand amplitude) and the like. Also, the number of cross guides the XYslider 360 of the first embodiment and the YZ slider 2160, the ZX slider2260 and the XY slider 2360 of the third embodiment include is notlimited to nine, but may be set to an arbitrary number of equal to ormore than three in accordance with a size of a vibrating table, a weightof a specimen, test conditions and the like.

In each of the above described embodiments (except for the fifthembodiment), the balls RE (balls) are used as rolling bodies of thelinear guide, but rollers (skids) may be used as the rolling bodies.

In each of the above described embodiments (except for the fifthembodiment), eight streaks of load paths are formed to the linear guide,but a plurality of load paths of five streaks, six streaks, sevenstreaks, or nine or more streaks may be provided. Also, in the linearguide of each of the above described embodiments (except for the fifthembodiment), a plurality of adjacently formed path pairs are provided,but the load paths need not be provided with the path pair as afundamental unit. A plurality of load paths may be provided at uniformintervals, or may be provided at completely non-uniform intervals. It isnoted that it is also possible to use the conventional four-streak typelinear guide having four streaks of load paths.

In each of the above described embodiments, the vertical direction isreferred to as the Z-axis direction, but the vertical direction may bereferred to as the Y-axis direction or the X-axis direction. Also, it ispreferable that each oscillating direction is in the horizontaldirection or the vertical direction, but the oscillating device may bearranged such that two or more axes of the three oscillating directionsare in the non-vertical and non-horizontal directions.

In each of the above described embodiments, the cross guides arearranged in a square lattice in two orthogonal directions at regularintervals, but the cross guides may be arranged in a hexagonal lattice(equilateral triangle pattern). For example, the XY slider can be madeto have a configuration in which the first orientation cross guide isarranged at the center of gravity of a equilateral triangle shapedperiodic structure (unit lattice) on the XY plane, and the secondorientation cross guide is arranged at each apex of the equilateraltriangle.

In the first embodiment described above, the opening for putting theoscillated object in and out of the vibrating table 400 is formed on thetop face of the box part 400 a, but this opening may be provided on aside face of the box part.

In the first embodiment described above, the female screws 421 and thethrough holes 432, 442 for attaching the oscillated object are providedon the vibrating table 400, but other types of attaching mechanisms(e.g., fixing bands, clamps, electromagnets or the like) for attachingthe oscillated object may be provided on the vibrating table 400.

The first embodiment described above is an example in which the presentdisclosure is applied to an electrodynamic oscillating device, but thepresent disclosure is not limited to this configuration and can beapplied to oscillating devices which use other types of oscillatingunits (e.g., a linear motion oscillating unit in which a rotary electricmotor or a hydraulic rotary motor and a rotation/linear motionconversion mechanism such as a feed screw mechanism are combined, alinear motor, a hydraulic cylinder and the like) as well.

Also, the oscillating device 1 of the first embodiment described aboveis an example in which the present disclosure is applied to a biaxialoscillating device, but the present disclosure can be applied touniaxial and triaxial oscillating devices as well.

Each of the above described embodiments is an example in which thepresent disclosure is applied to an electrodynamic oscillating device,but the present disclosure is not limited to this configuration and canbe applied to oscillating devices which use other types of oscillatingunits (e.g., a linear motion oscillating unit in which a rotary electricmotor or a hydraulic rotary motor and a rotation/linear motionconversion mechanism such as a feed screw mechanism are combined, alinear motor and the like) as well. For example, the present disclosurecan be applied to a conventionally known oscillating unit in which aservo motor and a ball screw mechanism are used.

Also, each of the above described embodiments is an example in which thepresent disclosure is applied to an electrodynamic triaxial simultaneousoscillating device, but the present disclosure can of course be appliedto uniaxial and biaxial oscillating devices as well.

Also, in the first embodiment, an air spring is used as a cushioningmeans for attenuating vibration of the supporting unit 350 (fixing partsupport mechanism), but configurations that use other types of springsthat have vibration prevention effects (e.g., a coil spring made ofsteel) or elastic bodies (such as a vibration prevention rubber) arealso possible.

The number of linear guides (one, two, three, four, or five or more) foreach axis and their arrangements in the slide coupling mechanism may beselected accordingly in accordance with a size of a vibrating table, asize and weight distribution of a specimen, test conditions (frequencyand amplitude) and the like. Also, the number of cross guides the XYslider 360 of the first embodiment and the YZ slider 2160, the ZX slider2260 and the XY slider 2360 of the third embodiment include is notlimited to nine, but may be set to an arbitrary number of equal to ormore than three in accordance with a size of a vibrating table, a weightof a specimen, test conditions and the like.

In the above described embodiments, the balls RE (balls) are used asrolling bodies of the linear guide, but rollers (skids) may be used asthe rolling bodies.

In the above described embodiments, eight streaks of load paths areformed to the linear guide, but a plurality of load paths of fivestreaks, six streaks, seven streaks, or nine or more streaks may beprovided. Also, in the linear guides of the above described embodiments(except for the fifth embodiment), a plurality of adjacently formed pathpairs are provided, but the load paths need not be provided with thepath pair as a fundamental unit. A plurality of load paths may beprovided at uniform intervals, or may be provided at completelynon-uniform intervals.

Furthermore, configurations in which parts of the components of each ofthe above described embodiments are removed, configurations in which aplurality of the above described embodiments are combined, andconfigurations in which parts or all of the components of two or more ofthe above described embodiments are combined are also included in thescope of the present disclosure.

<Supplement>

A triaxial oscillating device that oscillates a sample fixed to avibrating table in three orthogonal axis directions is known. Tooscillate the sample in three orthogonal axis directions, for example,the vibrating table and an X-axis actuator for oscillating the vibratingtable in the X-axis direction need to be coupled slidably in twodirections orthogonal to the X-axis (Y-axis direction and Z-axisdirection) with a biaxial slider. An oscillating device that enablestriaxial oscillation at a high frequency range by adopting biaxialsliders which use roller bearing type linear guideways (Hereinaftersimply referred to as “linear guide.”) that includes rolling bodies isconventionally known.

In the conventionally known oscillating device, slide couplingmechanisms for horizontal driving (YZ slider, ZX slider) that couple thevibrating table to actuators which drive in horizontal directions(X-axis actuator, Y-axis actuator) are connected to the vibrating tablevia one Y-axis or X-axis rail.

That is, since the conventionally known oscillating device is configuredto receive moments of forces about the Y-axis (or X-axis) that act onthe slide coupling mechanism for horizontal driving only with one thinY-axis rail (or X-axis rail), a rigidity against the moments of forcesabout the Y-axis (or X-axis) is lower than a rigidity against moments offorces about the Z-axis. This was one of the causes that blockimprovement in an accuracy of the oscillating device (especially theimprovement in the oscillating performance at high frequency ranges).

An aspect of the present disclosure is made in view of the abovesituation, and the object of the present disclosure is to improve theoscillating performance by improving the rigidity of the slide couplingmechanism.

What is claimed is:
 1. An oscillating device, comprising: a vibratingtable; an actuator configured to oscillate the vibrating table in afirst direction; a coupling mechanism configured to couple the vibratingtable with the actuator in such a manner that the vibrating table ismovable relative to the actuator in a second direction orthogonal to thefirst direction; and a counter balancer attached to the vibrating tableand configured to compensate an imbalance of an oscillated portionincluding at least the vibrating table, the imbalance being caused byattaching the coupling mechanism to the vibrating table.
 2. Theoscillating device according to claim 1, wherein the counter balancerhas: a weight; and a cushion, and wherein the weight is fixed to thevibrating table via the cushion.
 3. The oscillating device according toclaim 2, wherein the weight is formed in a flat plate shape.
 4. Theoscillating device according to claim 2, wherein the cushion is formedin a sheet shape.
 5. The oscillating device according to claim 2,wherein the cushion includes an elastomer.
 6. The oscillating deviceaccording to claim 2, wherein the cushion has a spacer configured tosupport the weight to be separated from the vibrating table.
 7. Theoscillating device according to claim 2, wherein the counter balancercomprises a plurality of bolts configured to fix the weight, and whereinthe plurality of bolts are disposed at intervals equal to or less than100 mm.
 8. The oscillating device according to claim 7, wherein theplurality of bolts are disposed at intervals equal to or less than 50mm.
 9. The oscillating device according to claim 2, wherein the weightincludes: a first weight member, and a second weight member, and whereinthe cushion includes: a first cushioning member nipped between thevibrating table and the fit weight member; and a second cushioningmember nipped between the first weight member and the second weightmember.
 10. The oscillating device according to claim 9, wherein thecushion further includes: a third weight member, and a third cushioningmember nipped between the second weight member and the third weightmember.
 11. The oscillating device according to claim 10, wherein: thefirst weight member is fixed to the vibrating table by a first bolt, thesecond weight member is fixed to the first weight member by a secondbolt, and the third weight member is fixed to the second weight memberby a third bolt.
 12. An oscillating device, comprising: a vibratingtable; an X-axis actuator configured to oscillate the vibrating table inan X-axis direction; a Y-axis actuator configured to oscillate thevibrating table in a Y-axis direction; a Z-axis actuator configured tooscillate the vibrating table in a Z-axis direction; wherein the X-axisdirection, the Y-axis direction and the Z-axis direction are orthogonalto each other, a YZ coupling mechanism configured to couple thevibrating table with the X-axis actuator in such a manner that thevibrating table is movable relative to the X-axis actuator in the Y-axisdirection and the Z-axis direction; a ZX coupling mechanism configuredto couple the vibrating table with the Y-axis actuator in such a mannerthat the vibrating table is movable relative to the Y-axis actuator inthe Z-axis direction and the X-axis direction; an XY coupling mechanismconfigured to couple the vibrating table with the Z-axis actuator insuch a manner that the vibrating table is movable relative to the Z-axisactuator in the X-axis direction and the Y-axis direction; a firstcounter balancer attached to the vibrating table and configured tocompensate a first imbalance of an oscillated portion including at leastthe vibrating table, the first imbalance being caused by attaching theYZ coupling mechanism to the vibrating table; a second counter balancerattached to the vibrating table and configured to compensate a secondimbalance of the oscillated portion, the second imbalance being causedby attaching the ZX coupling mechanism to the vibrating table; and athird counter balancer attached to the vibrating table and configured tocompensate a third imbalance of the oscillated portion, the thirdimbalance being caused by attaching the XY coupling mechanism to thevibrating table.
 13. The oscillating device according to claim 12,wherein the XY coupling mechanism comprises: an X-axis linear guidewayconfigured to guide a linear motion of the vibrating table in the X-axisdirection; and a Y-axis linear guideway configured to guide a linearmotion of the vibrating table in the Y-axis direction, wherein thevibrating table is coupled with the Z-axis actuator via the X-axislinear guideway and the Y-axis linear guideway, wherein the X-axislinear guideway comprises: an X-axis rail extending in the X-axisdirection; and an X-axis carriage engageable with the X-axis rail andslidable relative to the X-axis rail in the X-axis direction, andwherein eight load paths are formed between the X-axis carriage and theX-axis rail, each of the load paths being configured such that aplurality of rolling bodies roll therealong.
 14. An oscillating device,comprising: a vibrating table; an actuator configured to oscillate thevibrating table in a first direction; and a coupling mechanismconfigured to couple the vibrating table with the actuator in such amanner that the vibrating table is movable relative to the actuator in asecond direction orthogonal to the first direction, wherein thevibrating table includes a predetermined imbalance previously providedthereto, the predetermined imbalance being set to make a center ofgravity of an oscillated portion to be oscillated by the actuatorpositionally coincide with a center of an outer shape of the vibratingtable, the oscillated portion including the vibrating table and a partof the coupling mechanism.
 15. The oscillating device according to claim14, wherein the part of the coupling mechanism is fixed to the vibratingtable.